Device for the low-deformation replaceable mounting of an optical element

Abstract

The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount. The optical element is connected to the mount at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount and optical element. The mount is provided with at least three support feet distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points.

1 - 44 . (canceled) 
     
     
         45 . An assembly comprising:
 a housing for a projection objective for microlithography, the housing being configured to house a plurality of optical elements arranged along an axis;   a mount defining an aperture sized to accommodate one of the optical elements; and   a plurality of spring elements distributed at different azimuthal locations about the mount with respect to the axis and arranged to support and position the one of the optical elements in the aperture,   wherein the mount is attached to the objective housing at a plurality of mount bearing points and at least one spring element lies along a common radial direction as a corresponding mount bearing point with respect to the axis.   
     
     
         46 . The assembly of  claim 45 , wherein each of the spring elements lies along a common radial direction as a corresponding mount bearing point with respect to the axis. 
     
     
         47 . The assembly of  claim 45 , further comprising spacer elements each positioned at a corresponding mount bearing point. 
     
     
         48 . The assembly of  claim 47 , wherein at least one of the spacer elements is an active spacer element. 
     
     
         49 . The assembly of  claim 48 , wherein the active spaced element is a piezoelectric spacer element. 
     
     
         50 . The assembly of  claim 47 , wherein at least one of the spacer elements is a passive spacer element. 
     
     
         51 . The assembly of  claim 47 , wherein the spacer elements are spacer washers. 
     
     
         52 . The assembly of  claim 45 , wherein the mount is attached to the housing at each mount bearing point using a spacer element, a fixing element, and a spring element. 
     
     
         53 . The assembly of  claim 45 , wherein groups of the spring elements are arranged at equal azimuthal offsets from each other with respect to the axis. 
     
     
         54 . The assembly of  claim 53 , wherein the groups of spring elements are each composed of two spring elements. 
     
     
         55 . The assembly of  claim 53 , wherein the groups of spring elements are arranged at 120° offsets from each other with respect to the axis. 
     
     
         56 . The assembly of  claim 45 , wherein the one of the optical elements is a closure plate. 
     
     
         57 . The assembly of  claim 45 , wherein the spring elements are formed in one piece with the mount. 
     
     
         58 . The assembly of  claim 45 , wherein the mount has a thickness of greater than 1 mm. 
     
     
         59 . The assembly of  claim 45 , wherein the aperture has a diameter that is larger than a diameter of the one of the optical elements. 
     
     
         60 . The assembly of  claim 45 , wherein the mount has a reduced thickness in a region around the mount bearing points. 
     
     
         61 . The assembly of  claim 45 , wherein the mount has a reduced stiffness at the mount bearing points relative to other portions of the mount. 
     
     
         62 . The assembly of  claim 61 , wherein the stiffness of the mount at the mount bearing points is less than  50 % of other portions of the mount. 
     
     
         63 . The assembly of  claim 45 , wherein the mount is attached to the housing by retaining elements positioned at the mount bearing points. 
     
     
         64 . The assembly of  claim 45 , wherein the mount is attached to the objective housing via a total of three mount bearing points. 
     
     
         65 . A projection exposure system for microlithography comprising the assembly of  claim 45 . 
     
     
         66 . An assembly, comprising:
 a housing for a projection objective for microlithography, the housing being configured to house a plurality of optical elements arranged along an axis;   a mount defining an aperture sized to accommodate one of the optical elements; and   a plurality of spring elements distributed at different azimuthal locations about the mount with respect to the axis and arranged to support and position the one of the optical elements in the aperture,   wherein the mount is attached to the objective housing at a plurality of mount bearing points and at least one bearing point comprises an active spacer element.   
     
     
         67 . The assembly of  claim 66 , wherein the active spacer element is an active spacer washer. 
     
     
         68 . The assembly of  claim 66 , wherein the at least one mount bearing point further comprises a diaphragm. 
     
     
         69 . An assembly, comprising:
 a housing for a projection objective for microlithography, the housing being configured to house a plurality of optical elements arranged along an axis;   a mount defining an aperture sized to accommodate one of the optical elements; and   a plurality of spring elements distributed at different azimuthal locations about the mount with respect to the axis and arranged to support and position the one of the optical elements in the aperture,   wherein the mount is attached to the objective housing at a plurality of mount bearing points and at least one bearing point comprises a spacer element configured to reduce a stiffness of the mount at the bearing point in a first direction relative to another direction.   
     
     
         70 . The assembly of  claim 69 , wherein the spacer element is an active spacer washer.