Inventor · disambiguated record
Helmut Haidner
Also filed as: HAIDNER HELMUT
18 granted patents·6 pending applications·213 citations·filing 2001–2019
94Inventor score
Top patents by PatentIndex Score
24 records- 0192US7336371B1Apparatus and method for measuring the wavefront of an optical systemZEISS CARL SMT AG·Filed 2004·Granted Feb 26, 2008·49 cites·14 claims
- 0292US7333216B2Apparatus for wavefront detectionZEISS CARL SMT AG·Filed 2001·Granted Feb 19, 2008·46 cites·47 claims
- 0390US7408652B2Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2005·Granted Aug 5, 2008·12 cites·30 claims
- 0489US7301646B2Device and method for the determination of imaging errors and microlithography projection exposure systemZEISS CARL SMT AG·Filed 2005·Granted Nov 27, 2007·13 cites·20 claims
- 0587US7286245B2Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyserZEISS CARL SMT AG·Filed 2003·Granted Oct 23, 2007·28 cites·21 claims
- 0685US10006807B2Apparatus for determining an optical property of an optical imaging systemZEISS CARL SMT GMBH·Filed 2016·Granted Jun 26, 2018·3 cites·22 claims
- 0784US9494483B2Measuring system for measuring an imaging quality of an EUV lensZEISS CARL SMT GMBH·Filed 2014·Granted Nov 15, 2016·5 cites·24 claims
- 0884US7158237B2Interferometric measuring device and projection exposure installation comprising such measuring deviceZEISS CARL SMT AG·Filed 2004·Granted Jan 2, 2007·19 cites·40 claims
- 0983US7623218B2Method of manufacturing a miniaturized deviceZEISS CARL SMT AG·Filed 2005·Granted Nov 24, 2009·7 cites·21 claims
- 1079US7417745B2Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometryZEISS CARL SMT AG·Filed 2004·Granted Aug 26, 2008·21 cites·4 claims
- 1166US8120763B2Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2009·Granted Feb 21, 2012·1 cites·14 claims
- 1264US7388696B2Diffuser, wavefront source, wavefront sensor and projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Granted Jun 17, 2008·3 cites·25 claims
- 1362US7911624B2Device and method for the interferometric measurement of phase masksZEISS CARL SMS GMBH·Filed 2006·Granted Mar 22, 2011·3 cites·35 claims
- 1459US8836929B2Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT GMBH·Filed 2012·Granted Sep 16, 2014·0 cites·15 claims
- 1557US8134716B2Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methodsEMER WOLFGANG·Filed 2006·Granted Mar 13, 2012·3 cites·26 claims
- 1657US2009021726A1Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1755US2012113429A1Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2012·Application pending·0 cites
- 1854US2008144043A1Apparatus for wavefront detectionZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 1952US2008037905A1Method and apparatus for determining the influencing of the state of polarization by an optical system, and an analyserZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 2051US10324380B2Projection exposure apparatus and method for measuring an imaging aberrationZEISS CARL SMT GMBH·Filed 2018·Granted Jun 18, 2019·0 cites·22 claims
- 2151US2008130012A1Device and method for the determination of imaging errors and microlithography projection exposure systemZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 2247US9482968B2Measuring systemZEISS CARL SMT GMBH·Filed 2013·Granted Nov 1, 2016·0 cites·18 claims
- 2347US2007046912A1Interferometric measuring device and projection exposure installation comprising such measuring deviceZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 2445US11441970B2Measurement apparatus for measuring a wavefront aberration of an imaging optical systemZEISS CARL SMT GMBH·Filed 2019·Granted Sep 13, 2022·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →