Inventor · disambiguated record
Graham Mcfarlane
Also filed as: MCFARLANE GRAHAM · MCFARLANE GRAHAM A · MCFARLANE GRAHAM ANTHONY
2 granted patents·10 pending applications·31 citations·filing 2002–2010
55Inventor score
Top patents by PatentIndex Score
12 records- 0182US6955707B2Method of recycling fluorine using an adsorption purification processBOC GROUP INC·Filed 2002·Granted Oct 18, 2005·31 cites·18 claims
- 0250US2010290945A1Solution based zirconium precursors for atomic layer depositionMA CE·Filed 2009·Application pending·0 cites
- 0349US2009117274A1Solution based lanthanum precursors for atomic layer depositionMA CE·Filed 2008·Application pending·0 cites
- 0447US2010036144A1Methods for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 0543US2007079849A1Integrated chamber cleaning systemHOGLE RICHARD·Filed 2005·Application pending·0 cites
- 0643US2007074743A1H2 conditioning of chamber following cleaning cycleMCFARLANE GRAHAM·Filed 2005·Application pending·0 cites
- 0743US2006042462A1Method of recycling fluorine using an adsorption purification processEZELL EDWARD F·Filed 2005·Application pending·0 cites
- 0840US2010290968A1Solution based lanthanide and group iii precursors for atomic layer depositionMA CE·Filed 2009·Application pending·0 cites
- 0938US2007077778A1Method of forming low dielectric constant layerBOC GROUP INC·Filed 2005·Application pending·0 cites
- 1035US2004074516A1Sub-atmospheric supply of fluorine to semiconductor process chamberFiled 2002·Application pending·0 cites
- 1134US2006016459A1High rate etching using high pressure F2 plasma with argon dilutionMCFARLANE GRAHAM·Filed 2005·Application pending·0 cites
- 1232US8710253B2Solution based precursorsMA CE·Filed 2010·Granted Apr 29, 2014·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →