Assignee
MA CE
US·2 granted patents·12 pending applications·3 citations·filing 2004–2013
Top patents by PatentIndex Score
14 records- 0175US8261908B2Container for precursors used in deposition processesMA CE·Filed 2008·Granted Sep 11, 2012·3 cites·12 claims
- 0250US2010055321A1Precursors for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 0350US2010290945A1Solution based zirconium precursors for atomic layer depositionMA CE·Filed 2009·Application pending·0 cites
- 0450US2009305504A1Single precursors for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 0549US2009117274A1Solution based lanthanum precursors for atomic layer depositionMA CE·Filed 2008·Application pending·0 cites
- 0649US2009220374A1Method and apparatus for using solution precursors for atomic layer depositionMA CE·Filed 2009·Application pending·0 cites
- 0747US2010036144A1Methods for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 0845US2012295038A1Method and apparatus for using solution based precursors for atomic layer depositionMA CE·Filed 2011·Application pending·0 cites
- 0945US2012294753A1Method and apparatus for using solution based precursors for atomic layer depositionMA CE·Filed 2011·Application pending·0 cites
- 1040US2010290968A1Solution based lanthanide and group iii precursors for atomic layer depositionMA CE·Filed 2009·Application pending·0 cites
- 1139US2010151261A1Methods and apparatus for the vaporization and delivery of solution precursors for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 1236US2015211126A1Direct liquid injection of solution based precursors for atomic layer depositionMA CE·Filed 2013·Application pending·0 cites
- 1335US2006071213A1Low temperature selective epitaxial growth of silicon germanium layersMA CE·Filed 2004·Application pending·0 cites
- 1432US8710253B2Solution based precursorsMA CE·Filed 2010·Granted Apr 29, 2014·0 cites·13 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →