Inventor · disambiguated record
Shambhu N. Roy
Also filed as: ROY SHAMBHU · ROY SHAMBHU N · ROY SHAMBHU NATH
23 granted patents·7 pending applications·777 citations·filing 1999–2019
96Inventor score
Top patents by PatentIndex Score
30 records- 0198US9728437B2High temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2015·Granted Aug 8, 2017·123 cites·14 claims
- 0297US9484202B1Apparatus and methods for spacer deposition and selective removal in an advanced patterning processAPPLIED MATERIALS INC·Filed 2015·Granted Nov 1, 2016·22 cites·18 claims
- 0396US8390980B2Electrostatic chuck assemblySANSONI STEVEN V·Filed 2009·Granted Mar 5, 2013·187 cites·8 claims
- 0495US10271686B2Kitchen in a box cooking appliance with selectably engaged independent stirring and heating control for a plurality of cooking stationsROY SHAMBHU·Filed 2017·Granted Apr 30, 2019·43 cites·19 claims
- 0595US9447499B2Dual plenum, axi-symmetric showerhead with edge-to-center gas deliveryROY SHAMBHU N·Filed 2012·Granted Sep 20, 2016·24 cites·19 claims
- 0695US7331750B2Parallel robotMERZ MICHAEL·Filed 2005·Granted Feb 19, 2008·51 cites·15 claims
- 0795US6648583B1Parallel kinematics mechanism with a concentric spherical jointFiled 2002·Granted Nov 18, 2003·66 cites·18 claims
- 0894US8559159B2Electrostatic chuck and methods of use thereofROY SHAMBHU N·Filed 2011·Granted Oct 15, 2013·21 cites·20 claims
- 0993US9818585B2In situ plasma clean for removal of residue from pedestal surface without breaking vacuumAPPLIED MATERIALS INC·Filed 2014·Granted Nov 14, 2017·9 cites·20 claims
- 1093US6602042B2Parallel kinematics mechanism with a concentric spherical jointFiled 2002·Granted Aug 5, 2003·47 cites·12 claims
- 1192US9337067B2High temperature electrostatic chuck with radial thermal chokesROY SHAMBHU N·Filed 2012·Granted May 10, 2016·17 cites·38 claims
- 1287US6497548B1Parallel kinematics mechanism with a concentric sperical jointFiled 1999·Granted Dec 24, 2002·89 cites·30 claims
- 1385US9131807B2Robotic kitchen top cooking apparatus and method for preparation of dishes using computer recipiesROY SHAMBHU NATH·Filed 2011·Granted Sep 15, 2015·36 cites·16 claims
- 1483US9643324B1Multi-axis robot with remote drives facilitating hazardous energy isolation for use by home consumersROY SHAMBHU NATH·Filed 2015·Granted May 9, 2017·6 cites·19 claims
- 1579US8900471B2In situ plasma clean for removal of residue from pedestal surface without breaking vacuumGREEN RICHARD J·Filed 2010·Granted Dec 2, 2014·6 cites·17 claims
- 1671US9064911B2Heated cooling plate for E-chucks and pedestalsROY SHAMBHU N·Filed 2009·Granted Jun 23, 2015·4 cites·17 claims
- 1770US6740998B2Single motor, multi-axis stageADVANTEST CORP·Filed 2002·Granted May 25, 2004·13 cites·20 claims
- 1867US10879094B2Electrostatic chucking force measurement tool for process chamber carriersAPPLIED MATERIALS INC·Filed 2016·Granted Dec 29, 2020·1 cites·19 claims
- 1967US10589423B2Robot vision super visor for hybrid homing, positioning and workspace UFO detection enabling industrial robot use for consumer applicationsROY SHAMBHU NATH·Filed 2018·Granted Mar 17, 2020·1 cites·8 claims
- 2059US9382625B2Remote plasma source based cyclic CVD process for nanocrystalline diamond depositionAPPLIED MATERIALS INC·Filed 2014·Granted Jul 5, 2016·0 cites·20 claims
- 2155US10468285B2High temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 5, 2019·0 cites·19 claims
- 2254US7304264B2Micro thermal chamber having proximity control temperature management for devices under testADVANTEST CORP·Filed 2004·Granted Dec 4, 2007·6 cites·26 claims
- 2353US7337691B2Parallel kinematics mechanism with a concentric spherical jointROY SHAMBHU NATH·Filed 2004·Granted Mar 4, 2008·5 cites·24 claims
- 2442US2020286192A1Buffered order management system with computer vision checks for automated restaurant order assemblyROY SHAMBHU NATH·Filed 2019·Application pending·0 cites
- 2541US2004013509A1Parallel kinematics mechanism with a concentric spherical jointFiled 2003·Application pending·0 cites
- 2638US2018033673A1Substrate support with in situ wafer rotationAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2738US2020054175A1Restaurant food assembler robot with sequence and ingredient matrix optimization to increase thruput with dynamic batch size of orders platedROY SHAMBHU NATH·Filed 2018·Application pending·0 cites
- 2837US2010247804A1Biasable cooling pedestalAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 2936US2018122679A1Stress balanced electrostatic substrate carrier with contactsAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 3035US2018025931A1Processed wafer as top plate of a workpiece carrier in semiconductor and mechanical processingAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →