Inventor · disambiguated record
Keith Frank Best
Also filed as: BEST KEITH · BEST KEITH F · BEST KEITH FRANK
19 granted patents·13 pending applications·87 citations·filing 2003–2025
93Inventor score
Files withASML NETHERLANDS BV20ONTO INNOVATION INC8ASML HOLDING NV1ASML HOLDINGS N V1BEST KEITH FRANK1
Top patents by PatentIndex Score
32 records- 0180US7562686B2Method and system for 3D alignment in wafer scale integrationASML NETHERLANDS BV·Filed 2005·Granted Jul 21, 2009·10 cites·11 claims
- 0275US11126096B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2018·Granted Sep 21, 2021·1 cites·36 claims
- 0372US6844244B2Dual sided lithographic substrate imagingASML NETHERLANDS BV·Filed 2003·Granted Jan 18, 2005·19 cites·15 claims
- 0471US7501215B2Device manufacturing method and a calibration substrateASML NETHERLANDS BV·Filed 2005·Granted Mar 10, 2009·3 cites·9 claims
- 0570US11531279B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2021·Granted Dec 20, 2022·0 cites·15 claims
- 0670US7130049B2Method of measurement, method for providing alignment marks, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 31, 2006·10 cites·48 claims
- 0766US2024354485A1Tracking and/or predicting substrate yield during fabricationONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 0866US2025355368A1Metrology to reduce overlay errorONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 0965US7494828B2Substrate holder and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 24, 2009·2 cites·15 claims
- 1065US7442476B2Method and system for 3D alignment in wafer scale integrationASML NETHERLANDS BV·Filed 2004·Granted Oct 28, 2008·11 cites·16 claims
- 1165US7113258B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 26, 2006·9 cites·18 claims
- 1265US2025314974A1Front-to-back overlay (ftbo) standardONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 1363US2025258445A1Fiducial pattern alignment techniquesONTO INNOVATION INC·Filed 2025·Application pending·0 cites
- 1458US8576374B2Lithographic apparatus and methodBEST KEITH FRANK·Filed 2009·Granted Nov 5, 2013·3 cites·6 claims
- 1558US7256865B2Methods and apparatuses for applying wafer-alignment marksASML HOLDING NV·Filed 2003·Granted Aug 14, 2007·4 cites·10 claims
- 1658US2024319615A1Substrate edge patterning techniquesONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 1757US2025385139A1Inspection method and system for integrated circuit substratesONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 1856US6914664B2Lithographic apparatus, alignment method and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 5, 2005·5 cites·25 claims
- 1955US7019814B2Lithographic projection mask, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 28, 2006·5 cites·25 claims
- 2051US2007196746A1Methods and apparatuses for applying wafer-alignment marksCONSOLINI JOSEPH·Filed 2007·Application pending·0 cites
- 2148US7531040B2Resist recovery methodASML HOLDINGS N V·Filed 2003·Granted May 12, 2009·2 cites·14 claims
- 2246US7410880B2Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrateASML NETHERLANDS BV·Filed 2004·Granted Aug 12, 2008·2 cites·14 claims
- 2344US2008083818A1Measuring the bonding of bonded substratesASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 2443US2008117402A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 2542US7133117B2Dual sided lithographic substrate imagingASML NETHERLANDS BV·Filed 2004·Granted Nov 7, 2006·1 cites·18 claims
- 2641US7567340B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 28, 2009·0 cites·21 claims
- 2739US7041996B2Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted May 9, 2006·0 cites·23 claims
- 2838US7320847B2Alternate side lithographic substrate imagingASML NETHERLANDS BV·Filed 2003·Granted Jan 22, 2008·0 cites·26 claims
- 2937US2006035159A1Method of providing alignment marks, method of aligning a substrate, device manufacturing method, computer program, and deviceASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 3037US2006141744A1System and method of forming a bonded substrate and a bonded substrate productASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 3136US2006138681A1Substrate and lithography process using the sameASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 3236US2009128792A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →