Inventor · disambiguated record
Hiroshi Sobukawa
Also filed as: SOBUKAWA HIROSHI
24 granted patents·3 pending applications·321 citations·filing 1989–2023
96Inventor score
Top patents by PatentIndex Score
27 records- 0195US7411191B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Aug 12, 2008·20 cites·4 claims
- 0290US8003963B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 23, 2011·21 cites·23 claims
- 0390US7098045B2Processing method utilizing an apparatus to be sealed against workpieceEBARA CORP·Filed 2005·Granted Aug 29, 2006·14 cites·16 claims
- 0488US8530869B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Sep 10, 2013·7 cites·22 claims
- 0587US8624182B2Electro-optical inspection apparatus and method with dust or particle collection functionWATANABE KENJI·Filed 2011·Granted Jan 7, 2014·7 cites·12 claims
- 0684US4926648ATurbomolecular pump and method of operating the sameTOSHIBA CORP·Filed 1989·Granted May 22, 1990·40 cites·11 claims
- 0783US8067732B2Electron beam apparatusNAKASUJI MAMORU·Filed 2006·Granted Nov 29, 2011·8 cites·4 claims
- 0882US6382249B1Vacuum exhaust systemEBARA CORP·Filed 2000·Granted May 7, 2002·28 cites·4 claims
- 0981US5062271AEvacuation apparatus and evacuation methodTOSHIBA KK·Filed 1990·Granted Nov 5, 1991·45 cites·8 claims
- 1080US10995765B2Magnetic levitated pumpEBARA CORP·Filed 2015·Granted May 4, 2021·3 cites·15 claims
- 1180US6343910B1Turbo-molecular pumpEBERA CORP·Filed 2000·Granted Feb 5, 2002·26 cites·9 claims
- 1273US6589009B1Turbo-molecular pumpEBARA CORP·Filed 2000·Granted Jul 8, 2003·20 cites·4 claims
- 1372US11597051B2Method for polishing substrate including functional chipEBARA CORP·Filed 2018·Granted Mar 7, 2023·1 cites·11 claims
- 1472US6869890B2Processing apparatus to be sealed against workpieceEBARA CORP·Filed 2002·Granted Mar 22, 2005·12 cites·10 claims
- 1569US2023173636A1Method for polishing substrate including functional chipEBARA CORP·Filed 2023·Application pending·0 cites
- 1666US8109744B2Turbo vacuum pumpKAWASAKI HIROYUKI·Filed 2009·Granted Feb 7, 2012·4 cites·23 claims
- 1765US6585480B2Turbo-molecular pumpEBARA CORP·Filed 2002·Granted Jul 1, 2003·11 cites·5 claims
- 1856US9105444B2Electro-optical inspection apparatus and method with dust or particle collection functionEBARA CORP·Filed 2013·Granted Aug 11, 2015·0 cites·8 claims
- 1952US6220831B1Turbomolecular pumpEBARA CORP·Filed 1998·Granted Apr 24, 2001·18 cites·10 claims
- 2044US11607769B2Polishing apparatus of substrateEBARA CORP·Filed 2018·Granted Mar 21, 2023·0 cites·3 claims
- 2144US6062810ATurbomolecular pumpEBARA CORP·Filed 1998·Granted May 16, 2000·12 cites·5 claims
- 2244US2013259712A1Vacuum evacuation apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 2342US6002659ADisk drive deviceYAMAHA CORP·Filed 1997·Granted Dec 14, 1999·6 cites·12 claims
- 2439US5875168APickup device for a disk drive deviceYAMAHA CORP·Filed 1997·Granted Feb 23, 1999·5 cites·3 claims
- 2537US2003017047A1Turbo-molecular pumpEBARA CORP·Filed 2002·Application pending·0 cites
- 2636USRE36610EEvacuation apparatus and evacuation methodTOSHIBA KK·Filed 1997·Granted Mar 14, 2000·7 cites·10 claims
- 2734US6092994ALiquid delivery device, method of controlling such liquid delivery device, and liquid delivery pumpEBARA CORP·Filed 1998·Granted Jul 25, 2000·6 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →