Inventor · disambiguated record
Eric A. Englhardt
Also filed as: ENGLHARDT ERIC · ENGLHARDT ERIC A · ENGLHARDT ERIC ANDREW
75 granted patents·15 pending applications·1,244 citations·filing 1994–2023
99Inventor score
Top patents by PatentIndex Score
90 records- 0198US11527424B2Substrate transfer systems and methods of use thereofAPPLIED MATERIALS INC·Filed 2020·Granted Dec 13, 2022·16 cites·20 claims
- 0297US7359767B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyorAPPLIED MATERIALS INC·Filed 2006·Granted Apr 15, 2008·33 cites·25 claims
- 0396US7346431B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyerAPPLIED MATERIALS INC·Filed 2006·Granted Mar 18, 2008·27 cites·23 claims
- 0496US7234584B2System for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2003·Granted Jun 26, 2007·86 cites·23 claims
- 0595US11784074B2Substrate transfer systems and methods of use thereofAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·2 cites·20 claims
- 0695US8689812B2Methods and loadport for purging a substrate carrierSHAH VINAY K·Filed 2012·Granted Apr 8, 2014·18 cites·10 claims
- 0795US7819079B2Cartesian cluster tool configuration for lithography type processesAPPLIED MATERIALS INC·Filed 2006·Granted Oct 26, 2010·26 cites·11 claims
- 0895US7792608B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyorAPPLIED MATERIALS INC·Filed 2007·Granted Sep 7, 2010·21 cites·20 claims
- 0995US7651306B2Cartesian robot cluster tool architectureAPPLIED MATERIALS INC·Filed 2005·Granted Jan 26, 2010·50 cites·23 claims
- 1095US7243003B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyorAPPLIED MATERIALS INC·Filed 2003·Granted Jul 10, 2007·65 cites·90 claims
- 1195US6955197B2Substrate carrier having door latching and substrate clamping mechanismsAPPLIED MATERIALS INC·Filed 2003·Granted Oct 18, 2005·73 cites·26 claims
- 1294US7527141B2System for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2006·Granted May 5, 2009·20 cites·20 claims
- 1394US7299831B2Substrate carrier having door latching and substrate clamping mechanismsAPPLIED MATERIALS INC·Filed 2005·Granted Nov 27, 2007·20 cites·8 claims
- 1494US7077264B2Methods and apparatus for transporting substrate carriersAPPLIED MATERIAL INC·Filed 2004·Granted Jul 18, 2006·51 cites·37 claims
- 1593US7293642B2Methods and apparatus for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2006·Granted Nov 13, 2007·16 cites·31 claims
- 1692US8601975B2Methods and loadport apparatus for purging a substrate carrierSHAH VINAY K·Filed 2011·Granted Dec 10, 2013·11 cites·12 claims
- 1792US8066466B2Substrate processing sequence in a Cartesian robot cluster toolRICE MIKE·Filed 2010·Granted Nov 29, 2011·13 cites·17 claims
- 1891US7673735B2System for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2007·Granted Mar 9, 2010·15 cites·17 claims
- 1991US7603195B2Methods and apparatus for integrating large and small lot electronic device fabrication facilitiesAPPLIED MATERIALS INC·Filed 2006·Granted Oct 13, 2009·16 cites·13 claims
- 2091US7374393B2Method of retaining a substrate during a substrate transferring processAPPLIED MATERIALS INC·Filed 2006·Granted May 20, 2008·17 cites·4 claims
- 2190US7930061B2Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedbackAPPLIED MATERIALS INC·Filed 2007·Granted Apr 19, 2011·17 cites·18 claims
- 2290US7522968B2Scheduling method for processing equipmentAPPLIED MATERIALS INC·Filed 2007·Granted Apr 21, 2009·18 cites·17 claims
- 2390US7506746B2System for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2007·Granted Mar 24, 2009·12 cites·20 claims
- 2490US7221993B2Systems and methods for transferring small lot size substrate carriers between processing toolsAPPLIED MATERIALS INC·Filed 2004·Granted May 22, 2007·43 cites·23 claims
- 2589US8074597B2Methods and apparatus for purging a substrate carrierSHAH VINAY K·Filed 2007·Granted Dec 13, 2011·12 cites·13 claims
- 2689US7156221B2Break-away positioning conveyor mount for accommodating conveyor belt bendsAPPLIED MATERIALS INC·Filed 2004·Granted Jan 2, 2007·27 cites·12 claims
- 2788US9147592B2Linked vacuum processing tools and methods of using the sameAPPLIED MATERIALS INC·Filed 2013·Granted Sep 29, 2015·13 cites·20 claims
- 2888US8019467B2Scheduling method for processing equipmentAPPLIED MATERIALS INC·Filed 2007·Granted Sep 13, 2011·15 cites·18 claims
- 2988US7433756B2Calibration of high speed loader to substrate transport systemAPPLIED MATERIALS INC·Filed 2004·Granted Oct 7, 2008·34 cites·22 claims
- 3087US8225496B2Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminatedBACHRACH ROBERT Z·Filed 2008·Granted Jul 24, 2012·29 cites·4 claims
- 3187US7798764B2Substrate processing sequence in a cartesian robot cluster toolAPPLIED MATERIALS INC·Filed 2006·Granted Sep 21, 2010·22 cites·19 claims
- 3287US7230702B2Monitoring of smart pin transition timingAPPLIED MATERIALS INC·Filed 2004·Granted Jun 12, 2007·39 cites·57 claims
- 3386US7720557B2Methods and apparatus for enhanced operation of substrate carrier handlersAPPLIED MATERIALS INC·Filed 2006·Granted May 18, 2010·23 cites·10 claims
- 3486US7506747B2Break-away positioning conveyor mount for accommodating conveyor belt bendsAPPLIED MATERIALS INC·Filed 2006·Granted Mar 24, 2009·6 cites·10 claims
- 3586US7503448B2Break-away positioning conveyor mount for accommodating conveyor belt bendsAPPLIED MATERIALS INC·Filed 2006·Granted Mar 17, 2009·6 cites·20 claims
- 3686US5476548AReducing backside deposition in a substrate processing apparatus through the use of a shadow ringAPPLIED MATERIALS INC·Filed 1994·Granted Dec 19, 1995·92 cites·26 claims
- 3785US8911193B2Substrate processing sequence in a cartesian robot cluster toolRICE MIKE·Filed 2011·Granted Dec 16, 2014·12 cites·7 claims
- 3885US7611319B2Methods and apparatus for identifying small lot size substrate carriersAPPLIED MATERIALS INC·Filed 2005·Granted Nov 3, 2009·10 cites·33 claims
- 3985US7374391B2Substrate gripper for a substrate handling robotAPPLIED MATERIALS INC·Filed 2005·Granted May 20, 2008·9 cites·12 claims
- 4084US7258520B2Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closingAPPLIED MATERIALS INC·Filed 2003·Granted Aug 21, 2007·34 cites·45 claims
- 4183US7367446B2Methods and apparatus for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2006·Granted May 6, 2008·5 cites·14 claims
- 4283US7218983B2Method and apparatus for integrating large and small lot electronic device fabrication facilitiesAPPLIED MATERIALS INC·Filed 2004·Granted May 15, 2007·24 cites·23 claims
- 4382US7455172B2Break-away positioning conveyor mount for accommodating conveyor belt bendsAPPLIED MATERIALS INC·Filed 2006·Granted Nov 25, 2008·4 cites·19 claims
- 4481US12334376B2Substrate transfer systems and methods of use thereofAPPLIED MATERIALS INC·Filed 2023·Granted Jun 17, 2025·0 cites·17 claims
- 4581US7168553B2Dynamically balanced substrate carrier handlerAPPLIED MATERIALS INC·Filed 2004·Granted Jan 30, 2007·24 cites·43 claims
- 4680US7778721B2Small lot size lithography baysAPPLIED MATERIALS INC·Filed 2005·Granted Aug 17, 2010·7 cites·30 claims
- 4779US10087543B2Seal rings in electrochemical processorsAPPLIED MATERIALS INC·Filed 2017·Granted Oct 2, 2018·3 cites·11 claims
- 4879US9441792B2Transfer chamber gas purge apparatus, electronic device processing systems, and purge methodsAPPLIED MATERIALS INC·Filed 2014·Granted Sep 13, 2016·4 cites·18 claims
- 4979US7711445B2Systems and methods for transferring small lot size substrate carriers between processing toolsAPPLIED MATERIALS INC·Filed 2006·Granted May 4, 2010·5 cites·15 claims
- 5079US7552816B2Break-away positioning conveyor mount for accommodating conveyor belt bendsAPPLIED MATERIALS INC·Filed 2007·Granted Jun 30, 2009·3 cites·19 claims
Showing the top 50 of 90 patent records by PatentIndex Score.
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