Inventor · disambiguated record
Mike Binnard
Also filed as: BINNARD MIKE
13 granted patents·7 pending applications·356 citations·filing 2000–2007
94Inventor score
Files withNIKON CORP15
Top patents by PatentIndex Score
20 records- 0195US6408767B1Low stiffness suspension for a stageNIKON CORP·Filed 2000·Granted Jun 25, 2002·45 cites·57 claims
- 0295US6304320B1Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing sameNIKON CORP·Filed 2000·Granted Oct 16, 2001·65 cites·65 claims
- 0394US6885430B2System and method for resetting a reaction mass assembly of a stage assemblyNIKON CORP·Filed 2003·Granted Apr 26, 2005·43 cites·36 claims
- 0493US6603531B1Stage assembly including a reaction assembly that is connected by actuatorsNIKON CORP·Filed 2000·Granted Aug 5, 2003·39 cites·35 claims
- 0589US6313550B1Coil mounting and cooling system for an electric motorNIKON CORP·Filed 2000·Granted Nov 6, 2001·40 cites·32 claims
- 0683US6731372B2Multiple chamber fluid mountNIKON CORP·Filed 2001·Granted May 4, 2004·24 cites·42 claims
- 0780US6842248B1System and method for calibrating mirrors of a stage assemblyNIKON CORP·Filed 2000·Granted Jan 11, 2005·25 cites·37 claims
- 0880US6593997B1Stage assembly including a reaction assemblyNIKON CORP·Filed 2000·Granted Jul 15, 2003·17 cites·40 claims
- 0977US6958808B2System and method for resetting a reaction mass assembly of a stage assemblyNIKON CORP·Filed 2003·Granted Oct 25, 2005·15 cites·58 claims
- 1077US6888620B2System and method for holding a device with minimal deformationNIKON CORP·Filed 2001·Granted May 3, 2005·14 cites·144 claims
- 1177US6757053B1Stage assembly including a reaction mass assemblyNIKON CORP·Filed 2000·Granted Jun 29, 2004·15 cites·181 claims
- 1266US7221433B2Stage assembly including a reaction assembly having a connector assemblyNIKON CORP·Filed 2004·Granted May 22, 2007·8 cites·55 claims
- 1361US6882126B2Holder mover for a stage assemblyNIKON CORP·Filed 2001·Granted Apr 19, 2005·6 cites·114 claims
- 1447US2007268475A1System and method for controlling a stage assemblyNIKON CORP·Filed 2007·Application pending·0 cites
- 1541US2003218732A1Stage assembly including a reaction assemblyFiled 2003·Application pending·0 cites
- 1640US2003202167A1Stage assembly including a reaction assembly that is connected by actuatorsFiled 2003·Application pending·0 cites
- 1737US2003098963A1Fluid connector for a stage assemblyFiled 2001·Application pending·0 cites
- 1835US2002075467A1Exposure apparatus and methodNIKON CORP·Filed 2000·Application pending·0 cites
- 1935US2002137358A1Multiple point support assembly for a stageFiled 2001·Application pending·0 cites
- 2035US2003098965A1System and method for supporting a device holder with separate componentsFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →