Stage assembly including a reaction assembly that is connected by actuators

Abstract

A stage assembly ( 10 ) for moving and positioning a device ( 26 ) is provided herein. The stage assembly ( 10 ) includes a stage base ( 12 ), a stage ( 14 ), a stage mover assembly ( 16 ), and a reaction assembly ( 18 ). The stage mover assembly ( 16 ) moves the stage ( 14 ) along an X axis and along a Y axis relative to the stage base ( 12 ). The reaction assembly ( 18 ) is coupled to the stage mover assembly ( 16 ). Uniquely, the reaction assembly ( 18 ) reduces the reaction forces created by the stage mover assembly ( 16 ) in three degrees of freedom that are transferred to the stage base ( 12 ). As provided herein, the reaction assembly ( 18 ) includes a first reaction mass ( 88 ) and a second reaction mass ( 90 ) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly ( 16 ) has less influence upon the position of the stage base ( 12 ). These features allow for more accurate positioning of the device ( 26 ) by the stage assembly ( 10 ) and better performance of the stage assembly ( 10 ).

What is claimed is:  
     
         1 . A stage assembly that moves a device, the stage assembly comprising: 
 a device table that retains the device;    a stage base that supports the device table;    a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces in at least two degrees of freedom; and    a reaction assembly including (i) a reaction mass assembly coupled to the mover assembly, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom, and (ii) a reaction mover assembly that moves the reaction mass assembly relative to the stage base, the reaction mover assembly including a trim mover having a first component that is secured to the reaction mass assembly and a second component, the first component moving relative to the second component with at least two degrees of freedom.    
     
     
         2 . The stage assembly of  claim 1  further comprising a control system connected to the trim mover, the control system directing current to the trim mover to move the first component with at least two degrees of freedom relative to the second component.  
     
     
         3 . The stage assembly of  claim 1  wherein the reaction mass assembly includes a first reaction mass and a second reaction mass, and wherein at least one of the reaction masses moves relative to the stage base with at least three degrees of freedom to reduce the reaction forces.  
     
     
         4 . The stage assembly of  claim 1  wherein the reaction mass assembly includes a first reaction mass and a second reaction mass, wherein the reaction assembly includes a reaction base assembly, and wherein each reaction mass moves relative to the reaction base assembly with at least two degrees of freedom.  
     
     
         5 . The stage assembly of  claim 4  further comprising a first Y guide mover, a second Y guide mover, and a guide assembly which cooperate to connect the first reaction mass to the second reaction mass.  
     
     
         6 . The stage assembly of  claim 4  further comprising a first Y guide mover, a second Y guide mover, and a guide assembly coupled to the device table, wherein the first Y guide mover connects the guide assembly to the first reaction mass and the second Y guide mover connects the guide assembly to the second reaction mass.  
     
     
         7 . The stage assembly of  claim 4  wherein the mover assembly comprises (i) an X stage mover that moves the device table along an X axis, the X stage mover being coupled to the first reaction mass so that movement of the device table by the X stage mover results in movement of the first reaction mass along the X axis relative to the stage base, and (ii) a Y table mover that moves the device table along a Y axis, the Y table mover being coupled to the first reaction mass so that movement of the device table by the Y table mover results in movement of the first reaction mass along the Y axis relative to the stage base.  
     
     
         8 . The stage assembly of  claim 7  wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the stage base along the X axis, and along the Y axis.  
     
     
         9 . The stage assembly of  claim 8  wherein the reaction mover assembly adjusts the position of the second reaction mass relative to the stage base and the first reaction mass with at least two degrees of freedom.  
     
     
         10 . The stage assembly of  claim 8  wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the stage base about a Z axis.  
     
     
         11 . The stage assembly of  claim 7  further comprising a guide assembly, a first Y guide mover and a second Y guide mover which cooperate to connect the first reaction mass to the second reaction mass.  
     
     
         12 . The stage assembly of  claim 11  wherein the X stage mover moves the guide assembly along the X axis and the Y table mover moves the device table along the guide assembly.  
     
     
         13 . The stage assembly of  claim 11  wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the reaction base assembly and the second reaction mass with at least two degrees of freedom, and the reaction mover assembly adjusts the position of the second reaction mass relative to the reaction base assembly and the first reaction mass with at least two degrees of freedom.  
     
     
         14 . The stage assembly of  claim 11  wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the reaction base assembly and the second reaction mass with at least three degrees of freedom, and the reaction mover assembly adjusts the position of the second reaction mass relative to the reaction base assembly and the first reaction mass with at least three degrees of freedom.  
     
     
         15 . The stage assembly of  claim 4  wherein the reaction mover assembly includes at least one planar motor.  
     
     
         16 . The stage assembly of  claim 4  wherein the reaction mover assembly includes a first pair of planar motors that adjusts the position of the first reaction mass.  
     
     
         17 . The stage assembly of  claim 16  wherein the reaction mover assembly includes a second pair of planar motors that adjusts the position of the second reaction mass.  
     
     
         18 . The stage assembly of  claim 1  wherein the first component moves relative to the second component with at least three degrees of freedom.  
     
     
         19 . The stage assembly of  claim 1  further comprising a control system connected to the trim mover, the control system directing current to the trim mover to move the first component with at least three degrees of freedom relative to the second component.  
     
     
         20 . The stage assembly of  claim 1  wherein the trim mover moves at least a portion of the reaction mass assembly with at least two degrees of freedom relative to the stage base.  
     
     
         21 . The stage assembly of  claim 20  wherein the trim mover moves at least a portion of the reaction mass assembly with at least three degrees of freedom relative to the stage base.  
     
     
         22 . The stage assembly of  claim 1  wherein the trim mover includes a planar motor.  
     
     
         23 . An exposure apparatus including the stage assembly of  claim 1 .  
     
     
         24 . A device manufactured with the exposure apparatus according to  claim 23 .  
     
     
         25 . A wafer on which an image has been formed by the exposure apparatus of  claim 23 .  
     
     
         26 . A stage assembly that moves a device, the stage assembly comprising: 
 a device table that retains the device;    a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces;    a first reaction mass that is coupled to the mover assembly, the first reaction mass reducing the reaction forces; and    a reaction mover assembly secured to the first reaction mass, the reaction mover assembly including a trim mover having a planar motor that moves the first reaction mass with at least two degrees of freedom.    
     
     
         27 . The stage assembly of  claim 26  wherein the reaction mover assembly includes a pair of trim movers, each trim mover including a planar motor.  
     
     
         28 . The stage assembly of  claim 26  wherein the planar motor moves the first reaction mass with at least three degrees of freedom.  
     
     
         29 . The stage assembly of  claim 26  wherein the reaction mover assembly moves the first reaction mass relative to the stage base.  
     
     
         30 . The stage assembly of  claim 26  wherein the planar motor includes a first component that is secured to the first reaction mass and a second component, wherein current directed to the first component moves the first component relative to the second component with at least two degrees of freedom.  
     
     
         31 . The stage assembly of  claim 30  wherein current directed to the first component moves the first component relative to the second component with at least three degrees of freedom.  
     
     
         32 . The stage assembly of  claim 26  further comprising a second reaction mass and a reaction base assembly that supports the first reaction mass and the second reaction mass, the reaction base assembly being isolated from the stage base.  
     
     
         33 . The stage assembly of  claim 32  wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the reaction base assembly and the second reaction mass with at least two degrees of freedom, and the reaction mover assembly adjusts the position of the second reaction mass relative to the reaction base assembly and the first reaction mass with at least two degrees of freedom.  
     
     
         34 . The stage assembly of  claim 32  wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the reaction base assembly and the second reaction mass with at least three degrees of freedom, and the reaction mover assembly adjusts the position of the second reaction mass relative to the reaction base assembly and the first reaction mass with at least three degrees of freedom.  
     
     
         35 . A method for making a stage assembly that moves a device, the method comprising the steps of: 
 providing a device table that retains the device;    connecting a mover assembly to the device table, the mover assembly moving the device table with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and    coupling a first reaction mass and a second reaction mass to the mover assembly, each of the reaction masses moves with at least two degrees of freedom to reduce the reaction forces in at least two degrees of freedom, wherein the first reaction mass moves with at least two degrees of freedom relative to the second reaction mass.    
     
     
         36 . The method of  claim 35  wherein the step of coupling the first reaction mass and the second reaction mass includes the step of providing a guide assembly, a first Y guide mover that connects the guide assembly to the first reaction mass and a second Y guide mover that connects the guide assembly to the second reaction mass.  
     
     
         37 . The method of  claim 35  wherein the first reaction mass moves with at least three degrees of freedom relative the second reaction mass.  
     
     
         38 . The method of  claim 35  including the step of supporting the device table with a stage base, wherein the first reaction mass and the second reaction mass move relative to the stage base with at least two degrees of freedom.  
     
     
         39 . The method of  claim 35  including the step of connecting a reaction mover assembly to the first reaction mass and the second reaction mass, the reaction mover assembly independently adjusting the position of the reaction masses relative to a reaction base assembly along an axis.  
     
     
         40 . The method of  claim 35  including the step of connecting a reaction mover assembly to the first reaction mass and the second reaction mass, the reaction mover assembly independently adjusting the position of each of the reaction masses relative with at least two degrees of freedom.  
     
     
         41 . The method of  claim 35  including the step of connecting a reaction mover assembly to the first reaction mass and the second reaction mass, the reaction mover assembly independently adjusting the position of each of the reaction masses with at least three degrees of freedom.  
     
     
         42 . The method of  claim 41  wherein the step of connecting a reaction mover assembly includes the step of providing a first planar motor that moves the first reaction mass and a second planar motor that moves the second reaction mass.  
     
     
         43 . A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of: 
 providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and    providing the stage assembly made by the method of  claim 35 .    
     
     
         44 . A method of making a wafer utilizing the exposure apparatus made by the method of  claim 43 .  
     
     
         45 . A method of making a device including at least the exposure process; wherein the exposure process utilizes the exposure apparatus made by the method of  claim 43.