Inventor · disambiguated record
Yoshiyuki Kawafuchi
Also filed as: KAWAFUCHI YOSHIYUKI
4 granted patents·1 pending application·44 citations·filing 2002–2004
76Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0176US6811613B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Nov 2, 2004·17 cites·11 claims
- 0271US6860945B2Substrate coating unit and substrate coating methodTOKYO ELECTRON LTD·Filed 2002·Granted Mar 1, 2005·12 cites·13 claims
- 0370US6761125B2Coating film forming systemTOKYO ELECTRON LTD·Filed 2002·Granted Jul 13, 2004·14 cites·29 claims
- 0446US6932868B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Aug 23, 2005·1 cites·4 claims
- 0543US2005100681A1Substrate coating unit and substrate coating methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →