Inventor · disambiguated record
Tsung Feng Wu
Also filed as: WU TSUNG FENG
4 granted patents·3 pending applications·33 citations·filing 2012–2024
72Inventor score
Top patents by PatentIndex Score
7 records- 0193US11668602B2Spatial optical emission spectroscopy for etch uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·2 cites·18 claims
- 0290US9074978B2Optical space-time coding technique in microfluidic devicesLO YU-HWA·Filed 2012·Granted Jul 7, 2015·21 cites·27 claims
- 0382US10816550B2Systems, apparatus, and methods for sorting particlesNANOCELLECT BIOMEDICAL INC·Filed 2013·Granted Oct 27, 2020·10 cites·15 claims
- 0480US12405164B2Spatial optical emission spectroscopy for etch uniformityAPPLIED MATERIALS INC·Filed 2023·Granted Sep 2, 2025·0 cites·20 claims
- 0566US2025051901A1Method for surface treatment of corrosion-resistant nickel-based alloy and its structureFEEDBACK TECH CORP·Filed 2024·Application pending·0 cites
- 0659US2025191955A1Surface structure of an electrostatic chuck and method for forming the sameFEEDBACK TECH CORP·Filed 2024·Application pending·0 cites
- 0738US2022050374A1Protective film with high hardness and low friction coefficientFEEDBACK TECH CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →