Inventor · disambiguated record
Emi Matsui
Also filed as: MATSUI EMI
5 granted patents·1 pending application·16 citations·filing 2013–2020
72Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0190US9811096B2Liquid feeding device and substrate treating deviceSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Nov 7, 2017·9 cites·12 claims
- 0278US9718710B2Treatment apparatus and method for reusing treatment liquidTOSHIBA KK·Filed 2015·Granted Aug 1, 2017·3 cites·4 claims
- 0369US10586727B2Suction stage, lamination device, and method for manufacturing laminated substrateSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Mar 10, 2020·3 cites·14 claims
- 0461US9741596B2Bonding apparatus and bonding process methodSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Aug 22, 2017·1 cites·12 claims
- 0540US11322384B2Substrate processing apparatus and substrate processing methodSHIN ETSU ENG CO LTD·Filed 2020·Granted May 3, 2022·0 cites·12 claims
- 0639US2016225613A1Substrate treatment device, peeling method for laminated substrate, and method for removing adhesiveSHIBAURA MECHATRONICS CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →