Inventor · disambiguated record
Bharath Rangarajan
Also filed as: RANGARAJAN BHARATH · RANGARAJAN BHARATH KUMAR
190 granted patents·11 pending applications·4,916 citations·filing 1995–2024
99Inventor score
Files withADVANCED MICRO DEVICES INC175TARGET BRANDS INC8MOTIVO INC4GLOBALFOUNDRIES INC3UNIV MICHIGAN STATE2
Top patents by PatentIndex Score
201 records- 0199US6534243B1Chemical feature doubling processADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 18, 2003·249 cites·20 claims
- 0297US6537881B1Process for fabricating a non-volatile memory deviceADVANCED MICRO DEVICES INC·Filed 2000·Granted Mar 25, 2003·208 cites·18 claims
- 0396US6844206B1Refractive index system monitor and control for immersion lithographyADVANCED MICRO DEVICES LLP·Filed 2003·Granted Jan 18, 2005·127 cites·20 claims
- 0496US6561706B2Critical dimension monitoring from latent imageADVANCED MICRO DEVICES INC·Filed 2001·Granted May 13, 2003·97 cites·11 claims
- 0596US6492075B1Chemical trim processADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 10, 2002·83 cites·22 claims
- 0695US7080330B1Concurrent measurement of critical dimension and overlay in semiconductor manufacturingADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 18, 2006·79 cites·25 claims
- 0795US6594024B1Monitor CMP process using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 15, 2003·103 cites·26 claims
- 0894US6879051B1Systems and methods to determine seed layer thickness of trench sidewallsADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 12, 2005·56 cites·12 claims
- 0994US6771374B1Scatterometry based measurements of a rotating substrateADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 3, 2004·67 cites·22 claims
- 1094US6455416B1Developer soluble dyed BARC for dual damascene processADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 24, 2002·79 cites·20 claims
- 1193US6784446B1Reticle defect printability verification by resist latent image comparisonADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 31, 2004·53 cites·24 claims
- 1293US6570157B1Multi-pitch and line calibration for mask and wafer CD-SEM systemADVANCED MICRO DEVICES INC·Filed 2000·Granted May 27, 2003·69 cites·20 claims
- 1393US6486078B1Super critical drying of low k materialsADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 26, 2002·69 cites·20 claims
- 1493US6451621B1Using scatterometry to measure resist thickness and control implantADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 17, 2002·61 cites·6 claims
- 1593US6099783APhotopolymerizable compositions for encapsulating microelectronic devicesUNIV MICHIGAN STATE·Filed 1998·Granted Aug 8, 2000·102 cites·28 claims
- 1692US7224456B1In-situ defect monitor and control system for immersion medium in immersion lithographyADVANCED MICRO DEVICES INC·Filed 2004·Granted May 29, 2007·44 cites·15 claims
- 1792US6813574B1Topographically aligned layers and method for adjusting the relative alignment of layers and apparatus thereforADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 2, 2004·70 cites·20 claims
- 1892US6650422B2Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewithADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·58 cites·24 claims
- 1991US7065737B2Multi-layer overlay measurement and correction technique for IC manufacturingADVANCED MICRO DEVICES INC·Filed 2004·Granted Jun 20, 2006·51 cites·30 claims
- 2091US6999254B1Refractive index system monitor and control for immersion lithographyADVANCED MICRO DEVICES INC·Filed 2004·Granted Feb 14, 2006·31 cites·35 claims
- 2191US6559457B1System and method for facilitating detection of defects on a waferADVANCED MICRO DEVICES INC·Filed 2000·Granted May 6, 2003·52 cites·20 claims
- 2290US7158896B1Real time immersion medium control using scatterometryADVANCED MICRO DEVICES INC·Filed 2004·Granted Jan 2, 2007·35 cites·25 claims
- 2390US6654660B1Controlling thermal expansion of mask substrates by scatterometryADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 25, 2003·36 cites·26 claims
- 2490US6562185B2Wafer based temperature sensors for characterizing chemical mechanical polishing processesADVANCED MICRO DEVICES INC·Filed 2001·Granted May 13, 2003·35 cites·31 claims
- 2590US6459482B1Grainless material for calibration sampleADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 1, 2002·32 cites·22 claims
- 2690US6448097B1Measure fluorescence from chemical released during trim etchADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 10, 2002·48 cites·28 claims
- 2790US6406960B1Process for fabricating an ONO structure having a silicon-rich silicon nitride layerADVANCED MICRO DEVICES INC·Filed 1999·Granted Jun 18, 2002·83 cites·6 claims
- 2890US6274289B1Chemical resist thickness reduction processADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 14, 2001·37 cites·20 claims
- 2989US6954678B1Artificial intelligence system for track defect problem solvingADVANCED MICRO DEVICES INC·Filed 2002·Granted Oct 11, 2005·44 cites·31 claims
- 3089US6501534B1Automated periodic focus and exposure calibration of a lithography stepperADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 31, 2002·36 cites·31 claims
- 3189US6451512B1UV-enhanced silylation process to increase etch resistance of ultra thin resistsADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 17, 2002·36 cites·19 claims
- 3288US7251033B1In-situ reticle contamination detection system at exposure wavelengthADVANCED MICRO DEVICES INC·Filed 2004·Granted Jul 31, 2007·30 cites·17 claims
- 3388US7069155B1Real time analytical monitor for soft defects on reticle during reticle inspectionADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 27, 2006·25 cites·24 claims
- 3488US6556303B1Scattered signal collection using strobed techniqueADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 29, 2003·43 cites·45 claims
- 3587US6790790B1High modulus filler for low k materialsADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 14, 2004·37 cites·21 claims
- 3687US6579651B2Modification of mask layout data to improve mask fidelityADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 17, 2003·22 cites·40 claims
- 3787US6573497B1Calibration of CD-SEM by e-beam induced current measurementADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 3, 2003·26 cites·22 claims
- 3887US6445072B1Deliberate void in innerlayer dielectric gapfill to reduce dielectric constantADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 3, 2002·48 cites·14 claims
- 3987US6376013B1Multiple nozzles for dispensing resistADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 23, 2002·89 cites·30 claims
- 4087US6063531AFocus monitor structure and method for lithography processADVANCED MICRO DEVICES INC·Filed 1998·Granted May 16, 2000·66 cites·20 claims
- 4186US11403574B1Method and system for optimizing an item assortmentTARGET BRANDS INC·Filed 2019·Granted Aug 2, 2022·6 cites·21 claims
- 4286US7943289B2Inverse resist coating processGLOBALFOUNDRIES INC·Filed 2005·Granted May 17, 2011·9 cites·20 claims
- 4386US6809793B1System and method to monitor reticle heatingADVANCED MICRO DEVICES INC·Filed 2002·Granted Oct 26, 2004·25 cites·22 claims
- 4486US6528390B2Process for fabricating a non-volatile memory deviceADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 4, 2003·44 cites·16 claims
- 4586US6458656B1Process for creating a flash memory cell using a photoresist flow operationADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 1, 2002·41 cites·17 claims
- 4685US6617087B1Use of scatterometry to measure pattern accuracyADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 9, 2003·27 cites·7 claims
- 4785US6573498B1Electric measurement of reference sample in a CD-SEM and method for calibrationADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 3, 2003·25 cites·22 claims
- 4885US6444373B1Modification of mask layout data to improve mask fidelityADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 3, 2002·20 cites·15 claims
- 4985US6261904B1Dual bit isolation scheme for flash devicesADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 17, 2001·46 cites·17 claims
- 5084US6741445B1Method and system to monitor and control electro-static dischargeADVANCED MICRO DEVICES INC·Filed 2002·Granted May 25, 2004·30 cites·30 claims
Showing the top 50 of 201 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →