Inventor · disambiguated record
Andrew Shabalin
Also filed as: SHABALIN ANDREW
12 granted patents·9 pending applications·476 citations·filing 2000–2023
93Inventor score
Files withADVANCED ENERGY IND INC16ADVANCED ENERGY IND1ADVANCED ENERGY INDUSTRIES INC1MAUCK JUSTIN1SHABALIN ANDREW1
Top patents by PatentIndex Score
21 records- 0195US7115185B1Pulsed excitation of inductively coupled plasma sourcesADVANCED ENERGY IND INC·Filed 2003·Granted Oct 3, 2006·78 cites·28 claims
- 0294US6946063B1Deterioration resistant chambers for inductively coupled plasma productionADVANCED ENERGY IND INC·Filed 2003·Granted Sep 20, 2005·45 cites·30 claims
- 0394US6822396B2Transformer ignition circuit for a transformer coupled plasma sourceADVANCED ENERGY IND INC·Filed 2003·Granted Nov 23, 2004·45 cites·21 claims
- 0493US7245084B1Transformer ignition circuit for a transformer coupled plasma sourceADVANCED ENERGY IND INC·Filed 2004·Granted Jul 17, 2007·41 cites·10 claims
- 0593US6818257B2Method of providing a material processing ion beamADVANCED ENERGY IND INC·Filed 2002·Granted Nov 16, 2004·68 cites·12 claims
- 0693US6724148B1Mechanism for minimizing ion bombardment energy in a plasma chamberADVANCED ENERGY IND INC·Filed 2003·Granted Apr 20, 2004·49 cites·21 claims
- 0791US6451389B1Method for deposition of diamond like carbonADVANCED ENERGY IND INC·Filed 2000·Granted Sep 17, 2002·43 cites·44 claims
- 0890US6927358B2Vacuum seal protection in a dielectric breakADVANCED ENERGY IND INC·Filed 2003·Granted Aug 9, 2005·40 cites·17 claims
- 0988US7468494B2Reaction enhancing gas feed for injecting gas into a plasma chamberADVANCED ENERGY IND·Filed 2003·Granted Dec 23, 2008·42 cites·8 claims
- 1081US7241360B2Method and apparatus for neutralization of ion beam using AC ion sourceADVANCED ENERGY IND INC·Filed 2002·Granted Jul 10, 2007·24 cites·6 claims
- 1172US10797613B1Power supply system with actively switched bus capacitorADVANCED ENERGY IND INC·Filed 2019·Granted Oct 6, 2020·1 cites·10 claims
- 1267US2023360887A1Maintenance for remote plasma sourcesADVANCED ENERGY IND INC·Filed 2023·Application pending·0 cites
- 1364US2022277929A1Single-turn and laminated-wall inductively coupled plasma sourcesADVANCED ENERGY IND INC·Filed 2022·Application pending·0 cites
- 1452US2020286712A1Single-turn and laminated-wall inductively coupled plasma sourcesADVANCED ENERGY IND INC·Filed 2019·Application pending·0 cites
- 1549US2020266037A1Maintenance for remote plasma sourcesADVANCED ENERGY INDUSTRIES INC·Filed 2019·Application pending·0 cites
- 1649US2005098118A1Apparatus for deposition of diamond like carbonADVANCED ENERGY IND INC·Filed 2004·Application pending·0 cites
- 1748US7942112B2Method and apparatus for preventing the formation of a plasma-inhibiting substanceADVANCED ENERGY IND INC·Filed 2006·Granted May 17, 2011·0 cites·7 claims
- 1847US2008023146A1Inductively coupled plasma system with internal coilADVANCED ENERGY IND INC·Filed 2006·Application pending·0 cites
- 1945US2006081185A1Thermal management of dielectric components in a plasma discharge deviceMAUCK JUSTIN·Filed 2004·Application pending·0 cites
- 2035US2003209198A1Method and apparatus for neutralization of ion beam using ac or dc ion sourceFiled 2001·Application pending·0 cites
- 2131US2012074506A1Semiconductor Package for Higher Power TransistorsSHABALIN ANDREW·Filed 2010·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Andrew Shabalin files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →