Inventor · disambiguated record
Theodore H. Smick
Also filed as: SMICK THEODORE · SMICK THEODORE H
50 granted patents·6 pending applications·1,013 citations·filing 1997–2024
98Inventor score
Files withAPPLIED MATERIALS INC19NEUTRON THERAPEUTICS INC4TWIN CREEKS TECHNOLOGIES INC4NEUTRON THERAPEUTICS LLC3SMICK THEODORE H3
Top patents by PatentIndex Score
56 records- 0198US6515288B1Vacuum bearing structure and a method of supporting a movable memberAPPLIED MATERIALS INC·Filed 2000·Granted Feb 4, 2003·74 cites·21 claims
- 0296US7989784B2Ion implantation apparatus and a methodTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted Aug 2, 2011·30 cites·27 claims
- 0396US6437351B1Method and apparatus for controlling a workpiece in a vacuum chamberAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·82 cites·7 claims
- 0495US8227768B2Low-inertia multi-axis multi-directional mechanically scanned ion implantation systemSMICK THEODORE·Filed 2009·Granted Jul 24, 2012·80 cites·35 claims
- 0595US8101488B1Hydrogen implantation with reduced radiationSMICK THEODORE H·Filed 2010·Granted Jan 24, 2012·32 cites·23 claims
- 0694US8558486B2D. c. Charged particle accelerator, a method of accelerating charged particles using d. c. voltages and a high voltage power supply apparatus for use therewithSMICK THEODORE H·Filed 2010·Granted Oct 15, 2013·20 cites·19 claims
- 0794US7939812B2Ion source assembly for ion implantation apparatus and a method of generating ions thereinTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted May 10, 2011·23 cites·16 claims
- 0894US6501078B1Ion extraction assemblyAPPLIED MATERIALS INC·Filed 2000·Granted Dec 31, 2002·51 cites·18 claims
- 0992US8173452B1Method to form a device by constructing a support element on a thin semiconductor laminaPETTI CHRISTOPHER J·Filed 2010·Granted May 8, 2012·9 cites·28 claims
- 1092US8044374B2Ion implantation apparatusTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted Oct 25, 2011·25 cites·27 claims
- 1192US7982197B2Ion implantation apparatus and a method for fluid coolingTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted Jul 19, 2011·19 cites·7 claims
- 1292US5898179AMethod and apparatus for controlling a workpiece in a vacuum chamberORION EQUIPMENT INC·Filed 1997·Granted Apr 27, 1999·119 cites·10 claims
- 1391US8324599B2Ion implantation apparatusSMICK THEODORE H·Filed 2009·Granted Dec 4, 2012·16 cites·18 claims
- 1491US8101451B1Method to form a device including an annealed lamina and having amorphous silicon on opposing facesMURALI VENKATESAN·Filed 2010·Granted Jan 24, 2012·13 cites·14 claims
- 1591US7479644B2Ion beam diagnosticsAPPLIED MATERIALS INC·Filed 2006·Granted Jan 20, 2009·17 cites·32 claims
- 1690US6689221B2Cooling gas delivery system for a rotatable semiconductor substrate support assemblyAPPLIED MATERIALS INC·Filed 2001·Granted Feb 10, 2004·47 cites·32 claims
- 1789US11024437B2Neutron target for boron neutron capture therapyNEUTRON THERAPEUTICS INC·Filed 2016·Granted Jun 1, 2021·12 cites·18 claims
- 1889US8268645B2Method and apparatus for forming a thin laminaKELL ADAM·Filed 2011·Granted Sep 18, 2012·22 cites·26 claims
- 1989US6555832B1Determining beam alignment in ion implantation using Rutherford Back ScatteringAPPLIED MATERIALS INC·Filed 2000·Granted Apr 29, 2003·33 cites·19 claims
- 2086US7994486B2Substrate scanner apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Aug 9, 2011·9 cites·32 claims
- 2186US6163033AMethod and apparatus for controlling a workpiece in a vacuum chamberAPPLIED MATERIALS INC·Filed 1999·Granted Dec 19, 2000·61 cites·6 claims
- 2284US6903349B2Ion implanter and a method of implanting ionsAPPLIED MATERIALS INC·Filed 2003·Granted Jun 7, 2005·22 cites·21 claims
- 2383US8124946B2Post-decel magnetic energy filter for ion implantation systemsRYDING GEOFFREY·Filed 2009·Granted Feb 28, 2012·7 cites·14 claims
- 2482US9887066B2Systems for controlling a high power ion beamNEUTRON THERAPEUTICS INC·Filed 2015·Granted Feb 6, 2018·3 cites·22 claims
- 2581US6207959B1Ion implanterAPPLIED MATERIALS INC·Filed 1999·Granted Mar 27, 2001·36 cites·14 claims
- 2679US6956223B2Multi-directional scanning of movable member and ion beam monitoring arrangement thereforAPPLIED MATERIALS INC·Filed 2002·Granted Oct 18, 2005·24 cites·44 claims
- 2778US6331713B1Movable ion source assemblyAPPLIED MATERIALS INC·Filed 1999·Granted Dec 18, 2001·31 cites·19 claims
- 2876US12484140B2Compact motor-driven insulated electrostatic particle acceleratorNEUTRON THERAPEUTICS LLC·Filed 2024·Granted Nov 25, 2025·0 cites·11 claims
- 2976US8227763B2Isolation circuit for transmitting AC power to a high-voltage regionRICHARDS STEVEN·Filed 2009·Granted Jul 24, 2012·5 cites·21 claims
- 3076US7582883B2Method of scanning a substrate in an ion implanterAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·3 cites·19 claims
- 3173US8168941B2Ion beam angle calibration and emittance measurement system for ribbon beamsFARLEY MARVIN·Filed 2009·Granted May 1, 2012·5 cites·16 claims
- 3266US8518724B2Method to form a device by constructing a support element on a thin semiconductor laminaPETTI CHRISTOPHER J·Filed 2012·Granted Aug 27, 2013·0 cites·20 claims
- 3365US8723452B2D.C. charged particle accelerator and a method of accelerating charged particlesRYDING GEOFFREY·Filed 2011·Granted May 13, 2014·3 cites·6 claims
- 3463US8633458B2Ion implant apparatus and a method of implanting ionsSMICK THEODORE·Filed 2011·Granted Jan 21, 2014·1 cites·20 claims
- 3561US12062463B2Neutron target for boron neutron capture therapyNEUTRON THERAPEUTICS LLC·Filed 2021·Granted Aug 13, 2024·0 cites·10 claims
- 3659US11968774B2Compact motor-driven insulated electrostatic particle acceleratorNEUTRON THERAPEUTICS LLC·Filed 2019·Granted Apr 23, 2024·0 cites·10 claims
- 3756US8759803B2Ion implant apparatus and a method of implanting ionsGTAT CORP·Filed 2014·Granted Jun 24, 2014·0 cites·20 claims
- 3855US6452195B1Wafer holding pinIBIS TECHNOLOGY CORP·Filed 1999·Granted Sep 17, 2002·19 cites·36 claims
- 3954US8426829B2Ion implantation apparatusLEAVITT WILLIAM H·Filed 2010·Granted Apr 23, 2013·1 cites·5 claims
- 4053US6274875B1Fluid bearing vacuum seal assemblyAPPLIED MATERIALS INC·Filed 1999·Granted Aug 14, 2001·10 cites·15 claims
- 4152US11589452B2Ion beam filter for a neutron generatorNEUTRON THERAPEUTICS INC·Filed 2017·Granted Feb 21, 2023·0 cites·22 claims
- 4251US8378317B1Ion implant apparatus and method of ion implantationGTAT CORP·Filed 2011·Granted Feb 19, 2013·0 cites·22 claims
- 4351US2005191409A1Ion beam monitoring arrangementFiled 2005·Application pending·0 cites
- 4450US9883577B2Belt-shaped neutron sourceNEUTRON THERAPEUTICS INC·Filed 2017·Granted Jan 30, 2018·0 cites·20 claims
- 4550US6268609B1Apparatus and method for reducing heating of a workpiece in ion implantationAPPLIED MATERIALS INC·Filed 1999·Granted Jul 31, 2001·8 cites·5 claims
- 4650US2011042578A1Ion beam monitoring arrangementMURRELL ADRIAN·Filed 2010·Application pending·0 cites
- 4748US6155436AArc inhibiting wafer holder assemblyIBIS TECHNOLOGY CORP·Filed 1999·Granted Dec 5, 2000·13 cites·13 claims
- 4848US2006281310A1Rotating substrate support and methods of useAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 4946US6323496B1Apparatus for reducing distortion in fluid bearing surfacesAPPLIED MATERIALS INC·Filed 1999·Granted Nov 27, 2001·12 cites·17 claims
- 5044US2012291709A1Rotating substrate support and methods of useSMITH JACOB·Filed 2012·Application pending·0 cites
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →