Inventor · disambiguated record
Colin J. Brodsky
Also filed as: BRODSKY COLIN · BRODSKY COLIN J
29 granted patents·4 pending applications·167 citations·filing 2004–2014
96Inventor score
Top patents by PatentIndex Score
33 records- 0193US7799503B2Composite structures to prevent pattern collapseIBM·Filed 2007·Granted Sep 21, 2010·31 cites·24 claims
- 0293US7588879B2Graded spin-on organic antireflective coating for photolithographyIBM·Filed 2008·Granted Sep 15, 2009·15 cites·24 claims
- 0391US7310585B2Method of inspecting integrated circuits during fabricationIBM·Filed 2005·Granted Dec 18, 2007·17 cites·26 claims
- 0490US7786017B1Utilizing inverse reactive ion etching lag in double patterning contact formationIBM·Filed 2009·Granted Aug 31, 2010·19 cites·20 claims
- 0589US7239371B2Density-aware dynamic leveling in scanning exposure systemsIBM·Filed 2005·Granted Jul 3, 2007·12 cites·13 claims
- 0686US7083898B1Method for performing chemical shrink process over BARC (bottom anti-reflective coating)IBM·Filed 2005·Granted Aug 1, 2006·11 cites·20 claims
- 0785US7816069B2Graded spin-on organic antireflective coating for photolithographyIBM·Filed 2006·Granted Oct 19, 2010·7 cites·8 claims
- 0884US7917309B2System and method for detection and prevention of influx of airborne contaminantsIBM·Filed 2007·Granted Mar 29, 2011·9 cites·14 claims
- 0982US8582078B2Test method for determining reticle transmission stabilityBRUNNER TIMOTHY A·Filed 2011·Granted Nov 12, 2013·4 cites·17 claims
- 1082US7390616B2Method for post lithographic critical dimension shrinking using post overcoat planarizationIBM·Filed 2005·Granted Jun 24, 2008·6 cites·19 claims
- 1180US7288478B2Method for performing chemical shrink process over BARC (bottom anti-reflective coating)IBM·Filed 2005·Granted Oct 30, 2007·5 cites·7 claims
- 1274US7494919B2Method for post lithographic critical dimension shrinking using thermal reflow processIBM·Filed 2005·Granted Feb 24, 2009·4 cites·12 claims
- 1374US7354779B2Topography compensated film application methodsIBM·Filed 2006·Granted Apr 8, 2008·4 cites·15 claims
- 1471US8084185B2Substrate planarization with imprint materials and processesBURNS SEAN D·Filed 2009·Granted Dec 27, 2011·3 cites·26 claims
- 1568US7645621B2Optical inspection methodsIBM·Filed 2007·Granted Jan 12, 2010·3 cites·1 claims
- 1666US8023102B2Test method for determining reticle transmission stabilityIBM·Filed 2008·Granted Sep 20, 2011·1 cites·17 claims
- 1766US7473461B2Film stack having under layer for preventing pinhole defectsIBM·Filed 2007·Granted Jan 6, 2009·0 cites·7 claims
- 1864US7493186B2Method and algorithm for the control of critical dimensions in a thermal flow processIBM·Filed 2006·Granted Feb 17, 2009·2 cites·12 claims
- 1963US7229936B2Method to reduce photoresist pattern collapse by controlled surface microrougheningIBM·Filed 2004·Granted Jun 12, 2007·8 cites·14 claims
- 2063US7132316B2After deposition method of thinning film to reduce pinhole defectsIBM·Filed 2005·Granted Nov 7, 2006·1 cites·11 claims
- 2162US7824846B2Tapered edge bead removal process for immersion lithographyIBM·Filed 2007·Granted Nov 2, 2010·1 cites·16 claims
- 2260US8110496B2Method for performing chemical shrink process over BARC (bottom anti-reflective coating)BAILEY TODD CHRISTOPHER·Filed 2007·Granted Feb 7, 2012·1 cites·5 claims
- 2353US7267863B2Film stack having under layer for preventing pinhole defectsIBM·Filed 2004·Granted Sep 11, 2007·3 cites·6 claims
- 2452US7454302B2Method of inspecting integrated circuits during fabricationIBM·Filed 2007·Granted Nov 18, 2008·0 cites·13 claims
- 2550US8491984B2Structure resulting from chemical shrink process over BARC (bottom anti-reflective coating)BAILEY TODD CHRISTOPHER·Filed 2011·Granted Jul 23, 2013·0 cites·14 claims
- 2650US7541065B2Method of forming film stack having under layer for preventing pinhole defectsIBM·Filed 2007·Granted Jun 2, 2009·0 cites·2 claims
- 2750US2015102463A1High-k and metal filled trench-type edram capacitor with electrode depth and dimension controlIBM·Filed 2014·Application pending·0 cites
- 2849US2007037325A1After deposition method of thinning film to reduce pinhole defectsLI WAI-KIN·Filed 2006·Application pending·0 cites
- 2948US8168451B2Optical inspection methodsBRODSKY COLIN J·Filed 2009·Granted May 1, 2012·0 cites·20 claims
- 3047US9059194B2High-K and metal filled trench-type EDRAM capacitor with electrode depth and dimension controlIBM·Filed 2013·Granted Jun 16, 2015·0 cites·17 claims
- 3141US7632631B2Method of preventing pinhole defects through co-polymerizationIBM·Filed 2005·Granted Dec 15, 2009·0 cites·13 claims
- 3240US2006160037A1Automated sub-field blading for leveling optimization in lithography exposure toolIBM·Filed 2005·Application pending·0 cites
- 3339US2007178404A1Methods of preventing defects in antireflective coatingsIBM·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Colin J. Brodsky files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →