High-k and metal filled trench-type edram capacitor with electrode depth and dimension control

Abstract

Partial removal of organic planarizing layer (OPL) material forms a plug of OPL material within an aperture that protects underlying material or electronic device such as a deep trench capacitor during other manufacturing processes. The OPL plug thus can absorb any differences or non-uniformity in, for example, etch rates across the chip or wafer and preserve recess dimensions previously formed. control of a lateral component of later removal of the OPL plug by etching also can increase tolerance of overlay error in forming connections and thus avoid loss in manufacturing yield.

1 - 17 . (canceled) 
     
     
         18 . A semiconductor wafer including
 an electronic element formed below a surface of a substrate or layer of semiconductor material, and   a conductive body of material formed within an aperture and in contact with said electronic element wherein said conductive body of material is recessed substantially uniformly at all locations on said semiconductor wafer.   
     
     
         19 . The semiconductor wafer as recited in  claim 18  wherein said electronic element is a deep trench capacitor. 
     
     
         20 . A semiconductor device including
 two electronic elements formed below a surface of a substrate or layer of semiconductor material,   two conductive bodies of material formed within respective apertures and in contact with respective ones of said two electronic elements, and   a strap connection connecting said two conductive bodies wherein a width of said strap connection corresponds to a degree of overlay error in the location of said strap connection relative to said two conductive bodies.   
     
     
         21 . The semiconductor device as recited in  claim 20  wherein said conductive bodies of material are recessed substantially uniformly at all locations of said semiconductor device. 
     
     
         22 . The semiconductor device as recited in  claim 21  wherein one of said electronic elements is a deep trench capacitor.