Inventor · disambiguated record
Ryan Pakulski
Also filed as: PAKULSKI RYAN · PAKULSKI RYAN M · PAKULSKI RYAN MICHAEL
13 granted patents·18 pending applications·70 citations·filing 2004–2025
90Inventor score
Files withMATTSON TECH INC22APPLIED MATERIALS INC5DEVINE DANIEL J2BEIJING E TOWN SEMICONDUCTOR TECH CO LTD1NIEWMIERZYCKI LESZEK1
Top patents by PatentIndex Score
31 records- 0195US11348767B2Plasma processing apparatus having a focus ring adjustment assemblyMATTSON TECH INC·Filed 2020·Granted May 31, 2022·4 cites·15 claims
- 0292US7658586B2Advanced low cost high throughput processing platformMATTSON TECH INC·Filed 2005·Granted Feb 9, 2010·20 cites·32 claims
- 0391US7563068B2Low cost high throughput processing platformMATTSON TECH INC·Filed 2007·Granted Jul 21, 2009·16 cites·25 claims
- 0489US11508560B2Focus ring adjustment assembly of a system for processing workpieces under vacuumMATTSON TECH INC·Filed 2020·Granted Nov 22, 2022·2 cites·13 claims
- 0589US10790119B2Plasma processing apparatus with post plasma gas injectionMATTSON TECH INC·Filed 2017·Granted Sep 29, 2020·5 cites·3 claims
- 0686US9184072B2Advanced multi-workpiece processing chamberDEVINE DANIEL J·Filed 2007·Granted Nov 10, 2015·16 cites·45 claims
- 0782US10580672B2Systems and methods for workpiece processingMATTSON TECH INC·Filed 2017·Granted Mar 3, 2020·3 cites·12 claims
- 0877US2025299930A1Semiconductor chamber components with advanced coating techniquesAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0975US11201036B2Plasma strip tool with uniformity controlMATTSON TECH INC·Filed 2018·Granted Dec 14, 2021·2 cites·13 claims
- 1075US2023091035A1Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
- 1174US12362150B2Semiconductor chamber components with advanced coating techniquesAPPLIED MATERIALS INC·Filed 2023·Granted Jul 15, 2025·0 cites·15 claims
- 1268US11515127B2End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuumMATTSON TECH INC·Filed 2020·Granted Nov 29, 2022·0 cites·12 claims
- 1368US2021398775A1Plasma Strip Tool with Multiple Gas InjectionMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 1462US2021257196A1Plasma Processing Apparatus and MethodsMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 1561US2025093300A1Using acoustic resonance sensor devices for radical species detection to monitor processing chamber conditionsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1659US2021005431A1Plasma Processing Apparatus With Post Plasma Gas InjectionMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 1759US2025125181A1Low temperature electrostatic chuckAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1857US12002659B2Apparatus for generating etchants for remote plasma processesAPPLIED MATERIALS INC·Filed 2022·Granted Jun 4, 2024·0 cites·20 claims
- 1957US11257696B2Systems and methods for workpiece processingMATTSON TECH INC·Filed 2020·Granted Feb 22, 2022·0 cites·19 claims
- 2055US2018358204A1Plasma Strip Tool With Multiple Gas Injection ZonesMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 2154US2019198301A1Plasma Processing Apparatus and MethodsMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 2247US2021343506A1Methods And Apparatus For Pulsed Inductively Coupled Plasma For Surface Treatment ProcessingMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 2345US8668422B2Low cost high throughput processing platformNIEWMIERZYCKI LESZEK·Filed 2004·Granted Mar 11, 2014·2 cites·27 claims
- 2444US2020243305A1Post Plasma Gas Injection In A Separation GridMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 2542US2020161162A1Systems and methods for workpiece processingMATTSON TECH INC·Filed 2019·Application pending·0 cites
- 2641US2019131112A1Inductively Coupled Plasma Wafer Bevel Strip ApparatusMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 2739US2020258718A1Gas Supply With Angled Injectors In Plasma Processing ApparatusMATTSON TECH INC·Filed 2019·Application pending·0 cites
- 2839US2005205210A1Advanced multi-pressure workpiece processingDEVINE DANIEL J·Filed 2005·Application pending·0 cites
- 2938US2018358206A1Plasma Processing ApparatusMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 3037US2018053628A1Separation Grid for Plasma ChamberMATTSON TECH INC·Filed 2017·Application pending·0 cites
- 3136US2017207077A1Variable Pattern Separation Grid for Plasma ChamberMATTSON TECH INC·Filed 2017·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ryan Pakulski files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →