Inventor · disambiguated record
Hari Ponnekanti
Also filed as: PONNEKANTI HARI · PONNEKANTI HARI K · PONNEKANTI HARI KISHEN
47 granted patents·28 pending applications·4,126 citations·filing 1991–2025
98Inventor score
Top patents by PatentIndex Score
75 records- 0198US6635115B1Tandem process chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 21, 2003·500 cites·6 claims
- 0298US5855681AUltra high throughput wafer vacuum processing systemAPPLIED MATERIALS INC·Filed 1996·Granted Jan 5, 1999·1.1k cites·50 claims
- 0397US10056279B2Semiconductor process equipmentAPPLIED MATERIALS INC·Filed 2016·Granted Aug 21, 2018·22 cites·8 claims
- 0497US6152070ATandem process chamberAPPLIED MATERIALS INC·Filed 1996·Granted Nov 28, 2000·455 cites·29 claims
- 0597US6039834AApparatus and methods for upgraded substrate processing system with microwave plasma sourceAPPLIED MATERIALS INC·Filed 1997·Granted Mar 21, 2000·242 cites·25 claims
- 0697US5844195ARemote plasma sourceAPPLIED MATERIALS INC·Filed 1996·Granted Dec 1, 1998·388 cites·21 claims
- 0796US10734265B2Semiconductor process equipmentAPPLIED MATERIALS INC·Filed 2018·Granted Aug 4, 2020·13 cites·18 claims
- 0896US10483141B2Semiconductor process equipmentAPPLIED MATERIALS INC·Filed 2017·Granted Nov 19, 2019·13 cites·19 claims
- 0996US9040409B2Methods of forming solar cells and solar cell modulesAPPLIED MATERIALS INC·Filed 2014·Granted May 26, 2015·34 cites·20 claims
- 1096US8390980B2Electrostatic chuck assemblySANSONI STEVEN V·Filed 2009·Granted Mar 5, 2013·187 cites·8 claims
- 1194US10403535B2Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2015·Granted Sep 3, 2019·11 cites·17 claims
- 1294US10236197B2Processing system containing an isolation region separating a deposition chamber from a treatment chamberAPPLIED MATERIALS INC·Filed 2015·Granted Mar 19, 2019·11 cites·20 claims
- 1393US6831284B2Large area source for uniform electron beam generationAPPLIED MATERIALS INC·Filed 2002·Granted Dec 14, 2004·59 cites·47 claims
- 1493US6361707B1Apparatus and methods for upgraded substrate processing system with microwave plasma sourceAPPLIED MATERIALS INC·Filed 2000·Granted Mar 26, 2002·39 cites·26 claims
- 1593US5911834AGas delivery systemAPPLIED MATERIALS INC·Filed 1996·Granted Jun 15, 1999·133 cites·21 claims
- 1692US6230652B1Apparatus and methods for upgraded substrate processing system with microwave plasma sourceAPPLIED MATERIALS INC·Filed 2000·Granted May 15, 2001·43 cites·6 claims
- 1791US10577689B2Sputtering showerheadAPPLIED MATERIALS INC·Filed 2017·Granted Mar 3, 2020·3 cites·20 claims
- 1891US6082950AFront end wafer staging with wafer cassette turntables and on-the-fly wafer center findingAPPLIED MATERIALS INC·Filed 1996·Granted Jul 4, 2000·154 cites·17 claims
- 1991US6045618AMicrowave apparatus for in-situ vacuum line cleaning for substrate processing equipmentAPPLIED MATERIALS INC·Filed 1996·Granted Apr 4, 2000·130 cites·21 claims
- 2089US8021527B2Coaxial shafts for radial positioning of rotating magnetronAPPLIED MATERIALS INC·Filed 2007·Granted Sep 20, 2011·11 cites·25 claims
- 2188US11031262B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2020·Granted Jun 8, 2021·2 cites·20 claims
- 2288US5293870AMethod and apparatus for elastographic measurement and imagingUNIV TEXAS·Filed 1992·Granted Mar 15, 1994·121 cites·12 claims
- 2387US10388549B2On-board metrology (OBM) design and implication in process toolAPPLIED MATERIALS INC·Filed 2016·Granted Aug 20, 2019·8 cites·14 claims
- 2487US8129212B2Surface cleaning and texturing process for crystalline solar cellsWIJEKOON KAPILA·Filed 2009·Granted Mar 6, 2012·14 cites·31 claims
- 2586US6645303B2Heater/lift assembly for high temperature processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Nov 11, 2003·75 cites·33 claims
- 2685US7655092B2Tandem process chamberAPPLIED MATERIALS INC·Filed 2003·Granted Feb 2, 2010·27 cites·18 claims
- 2780US11713508B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·0 cites·18 claims
- 2879US8859324B2Methods of manufacturing solar cell devicesSTEWART MICHAEL P·Filed 2013·Granted Oct 14, 2014·2 cites·17 claims
- 2979US2024162020A1Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of A Moving SubstrateAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3078US6354241B1Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processingAPPLIED MATERIALS INC·Filed 1999·Granted Mar 12, 2002·48 cites·25 claims
- 3175US11948783B2Dynamic phased array plasma source for complete plasma coverage of a moving substrateAPPLIED MATERIALS INC·Filed 2017·Granted Apr 2, 2024·1 cites·16 claims
- 3275US5178147AMethod and apparatus for elastographic measurement and imagingUNIV TEXAS·Filed 1991·Granted Jan 12, 1993·176 cites·3 claims
- 3374US11396703B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2020·Granted Jul 26, 2022·0 cites·20 claims
- 3474US10636684B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2019·Granted Apr 28, 2020·1 cites·20 claims
- 3573US6077157AProcess chamber exhaust systemAPPLIED MATERIALS INC·Filed 1996·Granted Jun 20, 2000·42 cites·1 claims
- 3671US11923172B2Paired dynamic parallel plate capacitively coupled plasmasAPPLIED MATERIALS INC·Filed 2022·Granted Mar 5, 2024·0 cites·17 claims
- 3771US2024375221A1Removing elastomers from electronic device manufacturing equipment using laser technologyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3870US2020032392A1Hyrodgen partial pressure control in a vacuum process chamberAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3969US10403515B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2016·Granted Sep 3, 2019·1 cites·13 claims
- 4068US10435787B2Hydrogen partial pressure control in a vacuum process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Oct 8, 2019·0 cites·20 claims
- 4165US2025188587A1Radical species recombination in substrate processing systemsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4263US2025242406A1Alloy microstructure formation for chamber componentsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4362US11282676B2Paired dynamic parallel plate capacitively coupled plasmasAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·0 cites·19 claims
- 4461US11631583B2RF power source operation in plasma enhanced processesAPPLIED MATERIALS INC·Filed 2020·Granted Apr 18, 2023·0 cites·17 claims
- 4561US2014213016A1In situ silicon surface pre-clean for high performance passivation of silicon solar cellsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4660US2025132139A1Plasma process control using fluorine radical concentrationsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4760US2011033638A1Method and apparatus for deposition on large area substrates having reduced gas usageAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 4859US6163007AMicrowave plasma generating apparatus with improved heat protection of sealing O-ringsAPPLIED MATERIALS INC·Filed 1999·Granted Dec 19, 2000·14 cites·20 claims
- 4959US2025316502A1Monolithic gas distribution assembly for process chambersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 5058US7049606B2Electron beam treatment apparatusAPPLIED MATERIALS INC·Filed 2003·Granted May 23, 2006·3 cites·17 claims
Showing the top 50 of 75 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →