Inventor · disambiguated record
Mitsuo Yasaka
Also filed as: YASAKA MITSUO
2 granted patents·1 pending application·59 citations·filing 2001–2006
62Inventor score
Top patents by PatentIndex Score
3 records- 0183US6753499B1Method and apparatus for detecting anomalous discharge in plasma processing equipment using weakly-ionized thermal non-equilibrium plasmaJAPAN SCIENCE & TECH CORP·Filed 2001·Granted Jun 22, 2004·54 cites·26 claims
- 0274US7974067B2Plasma processing apparatus and method of suppressing abnormal discharge thereinRENESAS ELECTRONICS CORP·Filed 2006·Granted Jul 5, 2011·5 cites·12 claims
- 0328US2005194094A1Window type probe, plasma monitoring device, and plasma processing deviceFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →