Inventor · disambiguated record
Petra Alén
Also filed as: ALEN PETRA
3 granted patents·318 citations·filing 2002–2004
79Inventor score
Technology areasH10P
Files withASM INT3
Top patents by PatentIndex Score
3 records- 0195US6824816B2Process for producing metal thin films by ALDASM INT·Filed 2002·Granted Nov 30, 2004·136 cites·36 claims
- 0293US6706115B2Method for preparing metal nitride thin filmsASM INT·Filed 2002·Granted Mar 16, 2004·134 cites·27 claims
- 0390US7220451B2Process for producing metal thin films by ALDASM INT·Filed 2004·Granted May 22, 2007·48 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →