Inventor · disambiguated record
Jiann Lih Wu
Also filed as: WU JIANN LIH
9 granted patents·5 pending applications·31 citations·filing 2002–2023
83Inventor score
Top patents by PatentIndex Score
14 records- 0192US10065288B2Chemical mechanical polishing (CMP) platform for local profile controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 4, 2018·10 cites·20 claims
- 0282US10513006B2High throughput CMP platformTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 24, 2019·5 cites·20 claims
- 0375US9138861B2CMP pad cleaning apparatusWU JIANN LIH·Filed 2012·Granted Sep 22, 2015·5 cites·20 claims
- 0468US10090207B2Multi-point chemical mechanical polishing end point detection system and method of usingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted Oct 2, 2018·2 cites·17 claims
- 0568US2023211452A1Wafer polishing head, system thereof, and method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0665US11772227B2Device and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
- 0764US11602821B2Wafer polishing head, system thereof, and method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 14, 2023·0 cites·20 claims
- 0863US11999027B2Method for polishing semiconductor substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 4, 2024·0 cites·20 claims
- 0960US6998013B2CMP apparatus polishing head with concentric pressure zonesTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 14, 2006·9 cites·8 claims
- 1048US10875143B2Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·0 cites·20 claims
- 1145US2014196744A1Method and device for cleaning a brush surface having a contaminationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Application pending·0 cites
- 1240US2015107619A1Wafer particle removalTAIWAN SEMICONDUCTOR MFG·Filed 2013·Application pending·0 cites
- 1334US2013217306A1CMP Groove Depth and Conditioning Disk MonitoringWU JIANN LIH·Filed 2012·Application pending·0 cites
- 1434US2013210173A1Multiple Zone Temperature Control for CMPWU JIANN LIH·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →