Inventor · disambiguated record
Manabu Hama
Also filed as: HAMA MANABU
6 granted patents·1 pending application·174 citations·filing 2002–2011
83Inventor score
Top patents by PatentIndex Score
7 records- 0197US7867926B2Substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2008·Granted Jan 11, 2011·137 cites·20 claims
- 0278US6808566B2Reduced-pressure drying unit and coating film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Oct 26, 2004·20 cites·11 claims
- 0360US6903800B2Film-processing method and film-processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Jun 7, 2005·6 cites·17 claims
- 0457US7534467B2Reduced-pressure drying unit and coating film forming methodTOKYO ELECTRON LTD·Filed 2004·Granted May 19, 2009·5 cites·1 claims
- 0554US7195936B2Thin film processing method and systemTOKYO ELECTRON LTD·Filed 2003·Granted Mar 27, 2007·4 cites·7 claims
- 0652US8742721B2Battery charging warehouseHAMA MANABU·Filed 2011·Granted Jun 3, 2014·2 cites·11 claims
- 0745US2005196712A1Film-processing method and film-processing apparatusFiled 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →