Inventor · disambiguated record
Ulrich Rebhan
Also filed as: REBHAN ULRICH
15 granted patents·3 pending applications·359 citations·filing 1991–2004
94Inventor score
Top patents by PatentIndex Score
18 records- 0193US6804327B2Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-raysLAMBDA PHYSIK AG·Filed 2002·Granted Oct 12, 2004·89 cites·73 claims
- 0282US6727731B1Energy control for an excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2000·Granted Apr 27, 2004·27 cites·12 claims
- 0382US6414978B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Jul 2, 2002·14 cites·11 claims
- 0481US6414828B1Laser ventilation systemLAMBDA PHYSIK AG·Filed 2000·Granted Jul 2, 2002·31 cites·33 claims
- 0580US5140600AMethod of controlling the total energy amount of a plurality of laser pulsesLAMBDA PHYSIK GMBH·Filed 1991·Granted Aug 18, 1992·40 cites·5 claims
- 0674US6650679B1Preionization arrangement for gas laserLAMBDA PHYSIK AG·Filed 1999·Granted Nov 18, 2003·28 cites·48 claims
- 0774US6466599B1Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 1999·Granted Oct 15, 2002·28 cites·24 claims
- 0873US6556609B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Apr 29, 2003·8 cites·33 claims
- 0971US6493364B1Beam shutter for excimer laserLAMBDA PHYSIK AG·Filed 1999·Granted Dec 10, 2002·41 cites·15 claims
- 1070US6587202B2Optical materials testing methodLAMBDA PHYSIK AG·Filed 2000·Granted Jul 1, 2003·9 cites·17 claims
- 1165US5111473ALaser gas purifying apparatusLAMBDA PHYSIK FORSCHUNG·Filed 1991·Granted May 5, 1992·25 cites·1 claims
- 1262US6430205B2Discharge unit for a high repetition rate excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Aug 6, 2002·4 cites·16 claims
- 1358US6618422B2Preionization arrangement for a gas laserLAMBDA PHYSIK AG·Filed 2001·Granted Sep 9, 2003·4 cites·24 claims
- 1457US6735233B2Gas discharge laser with means for removing gas impuritiesLAMBDA PHYSIK AG·Filed 2002·Granted May 11, 2004·5 cites·6 claims
- 1539US5347532ALaser having at least one anode and one cathode for preionization and/or dischargeLAMBDA PHYSIK GMBH·Filed 1992·Granted Sep 13, 1994·6 cites·7 claims
- 1639US2005002427A1Cooled electrodes for high repetition excimer or molecular fluorine lasersFiled 2004·Application pending·0 cites
- 1738US2005083984A1Laser system sealingFiled 2004·Application pending·0 cites
- 1834US2002159207A1Laser ventilation systemLAMBDA PHYSIK AG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →