Laser ventilation system

Abstract

A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for exciter lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.

We claim:  
     
         1 . A ventilation system for a laser device, comprising: 
 a housing of the laser system which encloses a plurality of compartments and includes at least one air inlet;    an exhaust channel defined within the housing for receiving exhaust from the plurality of compartments;    a plurality of intake ports each of which is positioned downstream of at least one compartment and upstream of the exhaust channel;    one or more blowers for forcing exhaust to flow from the plurality of compartments to the exhaust channel; and    an exhaust port for expelling exhaust from the exhaust channel.    
     
     
         2 . The ventilation system of  claim 1 , further comprising at least one sensor for monitoring a condition of the laser device.  
     
     
         3 . The ventilation system of  claim 2 , wherein the condition is selected from the group consisting of exhaust flow speed, temperature, halogen concentration, ozone concentration, smoke concentration, pressure, differential pressure and whether a compartment is open.  
     
     
         4 . The ventilation system of  claim 2 , wherein the sensor has a location selected from the group consisting of the following locations: inside a compartment, inside the exhaust channel, near an air inlet and near an intake port.  
     
     
         5 . The ventilation system of  claim 2 , wherein the system includes only a single exhaust port.  
     
     
         6 . The ventilation system of  claim 2 , wherein the system includes only a single exhaust channel.  
     
     
         7 . The ventilation system of  claim 1 , wherein the system includes only a single exhaust port.  
     
     
         8 . The ventilation system of  claim 7 , wherein the system includes only a single exhaust channel.  
     
     
         9 . The ventilation system of  claim 1 , wherein the system includes only a single exhaust channel.  
     
     
         10 . The ventilation system of  claim 1 , wherein at least one blower is configured to operate at a selected one of a plurality of blower speeds, and wherein the system further comprises a sensor and a processor for monitoring a condition of the laser device and controlling the blower speed based on a value of the monitored condition.  
     
     
         11 . The ventilation system of  claim 1 , further comprising an aperture component for allowing exhaust to flow at a selected one or a plurality of exhaust flow rates, and a sensor and a processor for monitoring a condition of the laser device and controlling the aperture component based on a value of the monitored condition.  
     
     
         12 . A ventilation system for a laser device, comprising: 
 a housing of the laser system which encloses a plurality of compartments and includes at least one air inlet;    an exhaust channel defined within the housing for receiving exhaust from the plurality of compartments;    a plurality of intake ports each of which is positioned downstream of at least one compartment and upstream of the exhaust channel;    a single blower for forcing exhaust to flow from the plurality of compartments to the exhaust channel; and    an exhaust port for expelling exhaust from the exhaust channel.    
     
     
         13 . The ventilation system of  claim 12 , further comprising at least one sensor for monitoring a condition of the laser device.  
     
     
         14 . The ventilation system of  claim 13 , wherein the condition is selected from the group consisting of exhaust flow speed, temperature, halogen concentration, ozone concentration, smoke concentration, pressure, differential pressure and whether a compartment is open.  
     
     
         15 . The ventilation system of  claim 13 , wherein the sensor has a location selected from the group consisting of the following locations: inside a compartment, inside the exhaust channel, near an air inlet and near an intake port.  
     
     
         16 . The ventilation system of  claim 13 , wherein the system includes only a single exhaust port.  
     
     
         17 . The ventilation system of  claim 13 , wherein the system includes only a single exhaust channel.  
     
     
         18 . The ventilation system of  claim 12 , wherein the system includes only a single exhaust port.  
     
     
         19 . The ventilation system of  claim 18 , wherein the system includes only a single exhaust channel.  
     
     
         20 . The ventilation system of  claim 12 , wherein the system includes only a single exhaust channel.  
     
     
         21 . The ventilation system of  claim 12 , wherein the blower is configured to operate at a selected one of a plurality of blower speeds, and wherein the system further comprises a sensor and a processor for monitoring a condition of the laser device and controlling the blower speed based on a value of the monitored condition.  
     
     
         22 . The ventilation system of  claim 12 , further comprising an aperture component for allowing exhaust to flow at a selected one or a plurality of exhaust flow rates, and a sensor and a processor for monitoring a condition of the laser device and controlling the aperture component based on a value of the monitored condition.