Inventor · disambiguated record
Sven Antoin Johan Hol
Also filed as: HOL SVEN ANTOIN JOHAN
39 granted patents·1 pending application·246 citations·filing 2002–2020
97Inventor score
Top patents by PatentIndex Score
40 records- 0189US11315752B2E-beam apparatusASML NETHERLANDS BV·Filed 2020·Granted Apr 26, 2022·2 cites·15 claims
- 0287US7145269B2Lithographic apparatus, Lorentz actuator, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·30 cites·16 claims
- 0385US6906786B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jun 14, 2005·23 cites·27 claims
- 0482US7459808B2Lithographic apparatus and motorASML NETHERLANDS BV·Filed 2005·Granted Dec 2, 2008·13 cites·27 claims
- 0581US9785051B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·5 cites·29 claims
- 0680US10867770B2E-beam apparatusASML NETHERLANDS BV·Filed 2019·Granted Dec 15, 2020·2 cites·20 claims
- 0780US9110387B2Lithographic apparatus comprising a substrate table and a surface substrate actuatorBUTLER HANS·Filed 2012·Granted Aug 18, 2015·3 cites·15 claims
- 0878US9927711B2Actuation mechanism, optical apparatus and lithography apparatusASML NETHERLANDS BV·Filed 2014·Granted Mar 27, 2018·3 cites·20 claims
- 0976US7468589B2Lithographic apparatus having a controlled motor, and motor control system and methodASML NETHERLANDS BV·Filed 2006·Granted Dec 23, 2008·10 cites·19 claims
- 1074US9535340B2Support for a movable element and lithography apparatusASML NETHERLANDS BV·Filed 2013·Granted Jan 3, 2017·2 cites·20 claims
- 1172US9081307B2Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing methodHOL SVEN ANTOIN JOHAN·Filed 2011·Granted Jul 14, 2015·3 cites·13 claims
- 1272US7205741B2Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 17, 2007·27 cites·10 claims
- 1372US6943464B2Lithographic apparatus and motor for use in the apparatusASML NETHERLANDS BV·Filed 2003·Granted Sep 13, 2005·10 cites·20 claims
- 1470US7456935B2Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object tableASML NETHERLANDS BV·Filed 2005·Granted Nov 25, 2008·3 cites·20 claims
- 1570US6831285B2Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Dec 14, 2004·15 cites·39 claims
- 1669US9329501B2Lithographic apparatus, method of deforming a substrate table and device manufacturing methodHUANG YANG-SHAN·Filed 2012·Granted May 3, 2016·2 cites·19 claims
- 1769US7245047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 17, 2007·14 cites·21 claims
- 1869US6879377B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Apr 12, 2005·16 cites·11 claims
- 1969US6717296B2Lithographic apparatus and motor for use in the apparatusASML NETHERLANDS BV·Filed 2002·Granted Apr 6, 2004·23 cites·21 claims
- 2067US8896811B2Positioning system and a method for positioning a substage with respect to a frameHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Nov 25, 2014·2 cites·20 claims
- 2166US10372045B2Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuatorASML NETHERLANDS BV·Filed 2013·Granted Aug 6, 2019·2 cites·13 claims
- 2264US7167234B2Actuator assembly and lithographic apparatus comprising such an actuator assemblyASML NETHERLANDS BV·Filed 2004·Granted Jan 23, 2007·7 cites·17 claims
- 2363US7956982B2Apparatus for coolingASML NETHERLANDS BV·Filed 2005·Granted Jun 7, 2011·4 cites·21 claims
- 2461US7095485B2Lithographic linear motor, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 22, 2006·10 cites·17 claims
- 2560US9494869B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Nov 15, 2016·1 cites·20 claims
- 2659US7072025B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 4, 2006·1 cites·24 claims
- 2753US11764027B2Systems and methods of cooling objective lens of a charged-particle beam systemASML NETHERLANDS BV·Filed 2019·Granted Sep 19, 2023·0 cites·17 claims
- 2852US9494878B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Nov 15, 2016·0 cites·15 claims
- 2952US7161267B2Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 9, 2007·6 cites·15 claims
- 3049US7079226B2Lithographic actuator mechanism, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 18, 2006·2 cites·19 claims
- 3148US9921494B2Lithographic apparatus comprising an actuator, and method for protecting such actuatorASML NETHERLANDS BV·Filed 2013·Granted Mar 20, 2018·0 cites·13 claims
- 3247US11621142B2Substrate positioning device and electron beam inspection toolASML NETHERLANDS BV·Filed 2020·Granted Apr 4, 2023·0 cites·14 claims
- 3347US7224429B2Lithographic apparatus, device manufacturing method and positioning systemASML NETHERLANDS BV·Filed 2004·Granted May 29, 2007·3 cites·25 claims
- 3446US7088428B2Lithographic actuator mechanism, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 8, 2006·2 cites·21 claims
- 3546US2020303158A1Electron beam inspection tool and method for positioning an object tableASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 3645US7696652B2Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuatorASML NETHERLANDS BV·Filed 2005·Granted Apr 13, 2010·0 cites·5 claims
- 3743US9293951B2Lithographic apparatus and lorentz actuatorASML NETHERLANDS BV·Filed 2013·Granted Mar 22, 2016·0 cites·20 claims
- 3843US8687171B2Electromagnetic actuator, stage apparatus and lithographic apparatusHOL SVEN ANTOIN JOHAN·Filed 2012·Granted Apr 1, 2014·0 cites·15 claims
- 3940US9172294B2Planar motor and lithographic apparatus comprising such planar motorHOL SVEN ANTOIN JOHAN·Filed 2012·Granted Oct 27, 2015·0 cites·19 claims
- 4040US8472010B2Actuator, positioning system and lithographic apparatusHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Jun 25, 2013·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →