Inventor · disambiguated record
Mamoru Umemoto
Also filed as: UMEMOTO MAMORU
4 granted patents·3 citations·filing 2011–2020
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0177US9593422B2Substrate processing apparatus and semiconductor device manufacturing methodHITACHI INT ELECTRIC INC·Filed 2015·Granted Mar 14, 2017·2 cites·8 claims
- 0261US9175395B2Substrate processing apparatus and semiconductor device manufacturing methodASAI MASAYUKI·Filed 2011·Granted Nov 3, 2015·1 cites·10 claims
- 0351US9963785B2Substrate processing apparatus and semiconductor device manufacturing methodHITACHI INT ELECTRIC INC·Filed 2015·Granted May 8, 2018·0 cites·8 claims
- 0445US11515152B2Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrateKOKUSAI ELECTRIC CORP·Filed 2020·Granted Nov 29, 2022·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →