Inventor · disambiguated record
Richard Giljum
Also filed as: GILJUM RICHARD
7 granted patents·2 pending applications·244 citations·filing 1996–2023
83Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0196US11784076B2Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2022·Granted Oct 10, 2023·2 cites·24 claims
- 0293US5980194AWafer position error detection and correction systemAPPLIED MATERIALS INC·Filed 1996·Granted Nov 9, 1999·232 cites·31 claims
- 0390US10755955B2Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2018·Granted Aug 25, 2020·4 cites·20 claims
- 0484US11424149B2Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2020·Granted Aug 23, 2022·1 cites·20 claims
- 0580US2023420279A1Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0677US9177842B2Degassing apparatus adapted to process substrates in multiple tiers with second actuatorENGLHARDT ERIC A·Filed 2012·Granted Nov 3, 2015·5 cites·5 claims
- 0753US10217650B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2016·Granted Feb 26, 2019·0 cites·13 claims
- 0851US9443714B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2013·Granted Sep 13, 2016·0 cites·18 claims
- 0939US2020126826A1Load lock body portions, load lock apparatus, and methods for manufacturing the sameAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →