Inventor · disambiguated record
Ali Zojaji
Also filed as: ZOJAJI ALI
13 granted patents·1 pending application·213 citations·filing 2005–2012
92Inventor score
Top patents by PatentIndex Score
14 records- 0198US8029620B2Methods of forming carbon-containing silicon epitaxial layersAPPLIED MATERIALS INC·Filed 2007·Granted Oct 4, 2011·95 cites·15 claims
- 0295US7682940B2Use of Cl2 and/or HCl during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2005·Granted Mar 23, 2010·32 cites·37 claims
- 0391US7651948B2Pre-cleaning of substrates in epitaxy chambersAPPLIED MATERIALS INC·Filed 2006·Granted Jan 26, 2010·18 cites·20 claims
- 0489US8445389B2Etchant treatment processes for substrate surfaces and chamber surfacesZOJAJI ALI·Filed 2012·Granted May 21, 2013·8 cites·20 claims
- 0589US7960256B2Use of CL2 and/or HCL during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2010·Granted Jun 14, 2011·8 cites·14 claims
- 0688US7732305B2Use of Cl2 and/or HCl during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2006·Granted Jun 8, 2010·10 cites·21 claims
- 0787US8093154B2Etchant treatment processes for substrate surfaces and chamber surfacesZOJAJI ALI·Filed 2005·Granted Jan 10, 2012·10 cites·25 claims
- 0887US7598178B2Carbon precursors for use during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2007·Granted Oct 6, 2009·16 cites·22 claims
- 0986US7195934B2Method and system for deposition tuning in an epitaxial film growth apparatusAPPLIED MATERIALS INC·Filed 2005·Granted Mar 27, 2007·5 cites·23 claims
- 1085US7732269B2Method of ultra-shallow junction formation using Si film alloyed with carbonAPPLIED MATERIALS INC·Filed 2007·Granted Jun 8, 2010·10 cites·2 claims
- 1167US8586456B2Use of CL2 and/or HCL during silicon epitaxial film formationYE ZHIYUAN·Filed 2011·Granted Nov 19, 2013·1 cites·16 claims
- 1260US2007128780A1Method and system for deposition tuning in an epitaxial film growth apparatusAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1351US7674337B2Gas manifolds for use during epitaxial film formationAPPLIED MATERIALS INC·Filed 2007·Granted Mar 9, 2010·0 cites·12 claims
- 1438US9890455B2Pre-heat ring designs to increase deposition uniformity and substrate throughputMYO NYI O·Filed 2011·Granted Feb 13, 2018·0 cites·17 claims
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