Inventor · disambiguated record
Robert T. Caveney
Also filed as: CAVENEY ROBERT · CAVENEY ROBERT T
81 granted patents·15 pending applications·1,543 citations·filing 1996–2024
99Inventor score
Files withBROOKS AUTOMATION INC62BROOKS AUTOMATION US LLC19HOFMEISTER CHRISTOPHER5CAVENEY ROBERT T3AZENTA US INC2
Top patents by PatentIndex Score
96 records- 0198US7988398B2Linear substrate transport apparatusBROOKS AUTOMATION INC·Filed 2004·Granted Aug 2, 2011·141 cites·10 claims
- 0298US7959395B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2006·Granted Jun 14, 2011·92 cites·9 claims
- 0397US9948155B2Sealed robot driveBROOKS AUTOMATION INC·Filed 2014·Granted Apr 17, 2018·16 cites·47 claims
- 0497US7925378B2Process apparatus with on-the-fly workpiece centeringBROOKS AUTOMATION INC·Filed 2006·Granted Apr 12, 2011·545 cites·10 claims
- 0596US10336539B2Automated cryogenic storage systemBROOKS AUTOMATION INC·Filed 2016·Granted Jul 2, 2019·15 cites·27 claims
- 0696US9862554B2Semiconductor wafer handling and transportBROOKS AUTOMATION INC·Filed 2012·Granted Jan 9, 2018·17 cites·20 claims
- 0796US9761478B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2015·Granted Sep 12, 2017·11 cites·42 claims
- 0896US9751209B2Compact direct drive spindleBROOKS AUTOMATION INC·Filed 2015·Granted Sep 5, 2017·9 cites·11 claims
- 0996US7575406B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2003·Granted Aug 18, 2009·118 cites·38 claims
- 1095US10493620B2Compact direct drive spindleBROOKS AUTOMATION INC·Filed 2017·Granted Dec 3, 2019·6 cites·20 claims
- 1195US10421607B2Cryogenic freezerBROOKS AUTOMATION INC·Filed 2016·Granted Sep 24, 2019·8 cites·22 claims
- 1295US10325795B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2017·Granted Jun 18, 2019·7 cites·25 claims
- 1395US9248568B2Unequal link SCARA armCAVENEY ROBERT T·Filed 2005·Granted Feb 2, 2016·30 cites·11 claims
- 1495US8918203B2Substrate processing apparatusGILCHRIST ULYSSES·Filed 2012·Granted Dec 23, 2014·18 cites·24 claims
- 1594US12060223B2Automated cryogenic storage systemAZENTA US INC·Filed 2022·Granted Aug 13, 2024·1 cites·19 claims
- 1694US7904182B2Scalable motion control systemBROOKS AUTOMATION INC·Filed 2005·Granted Mar 8, 2011·41 cites·34 claims
- 1794US7607879B2Substrate processing apparatus with removable component moduleBROOKS AUTOMATION INC·Filed 2005·Granted Oct 27, 2009·36 cites·10 claims
- 1893US10600665B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2019·Granted Mar 24, 2020·4 cites·21 claims
- 1993US8602706B2Substrate processing apparatusHOFMEISTER CHRISTOPHER·Filed 2009·Granted Dec 10, 2013·25 cites·13 claims
- 2093US7578649B2Dual arm substrate transport apparatusBROOKS AUTOMATION INC·Filed 2002·Granted Aug 25, 2009·68 cites·19 claims
- 2192US11276598B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2020·Granted Mar 15, 2022·2 cites·26 claims
- 2292US10468936B2Sealed robot driveBROOKS AUTOMATION INC·Filed 2018·Granted Nov 5, 2019·3 cites·20 claims
- 2392US10204817B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2017·Granted Feb 12, 2019·5 cites·29 claims
- 2492US9230841B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2014·Granted Jan 5, 2016·8 cites·29 claims
- 2590US10239707B2Semiconductor wafer handling and transportBROOKS AUTOMATION INC·Filed 2018·Granted Mar 26, 2019·4 cites·21 claims
- 2690US9852935B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2016·Granted Dec 26, 2017·4 cites·25 claims
- 2790US8827617B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2013·Granted Sep 9, 2014·8 cites·25 claims
- 2889US2024359914A1Automated Cryogenic Storage SystemAZENTA US INC·Filed 2024·Application pending·0 cites
- 2988US9623555B2Dual arm robotKRUPYSHEV ALEXANDER G·Filed 2011·Granted Apr 18, 2017·15 cites·19 claims
- 3088US9570330B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2014·Granted Feb 14, 2017·6 cites·15 claims
- 3188US8267636B2Substrate transport apparatusHOFMEISTER CHRISTOPHER·Filed 2008·Granted Sep 18, 2012·9 cites·17 claims
- 3287US11658051B2Substrate transportBROOKS AUTOMATION US LLC·Filed 2021·Granted May 23, 2023·1 cites·23 claims
- 3387US11267649B2Cryogenic freezerBROOKS AUTOMATION INC·Filed 2019·Granted Mar 8, 2022·1 cites·16 claims
- 3487US10395959B2Substrate transportBROOKS AUTOMATION INC·Filed 2014·Granted Aug 27, 2019·6 cites·44 claims
- 3587US2024063682A1Sealed robot driveBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 3687US2024109187A1Compact direct drive spindleBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 3786US10661990B2Automated cryogenic storage systemBROOKS AUTOMATION INC·Filed 2019·Granted May 26, 2020·3 cites·21 claims
- 3886US8651789B2Substrate processing apparatusHOFMEISTER CHRISTOPHER·Filed 2011·Granted Feb 18, 2014·6 cites·25 claims
- 3986US6769861B2Apparatus for alignment and orientation of a wafer for processingBROOKS AUTOMATION INC·Filed 2002·Granted Aug 3, 2004·35 cites·10 claims
- 4085US10406679B2Unequal link SCARA armBROOKS AUTOMATION INC·Filed 2016·Granted Sep 10, 2019·3 cites·13 claims
- 4183US12300528B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2024·Granted May 13, 2025·0 cites·18 claims
- 4283US11772261B2Compact direct drive spindleBROOKS AUTOMATION US LLC·Filed 2022·Granted Oct 3, 2023·0 cites·16 claims
- 4383US10488851B2Scalable motion control systemBROOKS AUTOMATION INC·Filed 2015·Granted Nov 26, 2019·2 cites·8 claims
- 4483US10134621B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2014·Granted Nov 20, 2018·5 cites·18 claims
- 4583US9656386B2Coaxial drive vacuum robotCAVENEY ROBERT T·Filed 2011·Granted May 23, 2017·6 cites·20 claims
- 4682US11545380B2Transport apparatus with linear bearingBROOKS AUTOMATION INC·Filed 2019·Granted Jan 3, 2023·2 cites·16 claims
- 4782US9186799B2Compact direct drive spindleCAVENEY ROBERT T·Filed 2012·Granted Nov 17, 2015·3 cites·17 claims
- 4882US5894760ASubstrate transport drive systemBROOKS AUTOMATION INC·Filed 1997·Granted Apr 20, 1999·62 cites·36 claims
- 4981US12263587B2Dual arm robotBROOKS AUTOMATION US LLC·Filed 2023·Granted Apr 1, 2025·0 cites·21 claims
- 5081US10748799B2Substrate transport apparatus with interchangeable motor modulesBROOKS AUTOMATION INC·Filed 2016·Granted Aug 18, 2020·2 cites·35 claims
Showing the top 50 of 96 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →