Inventor · disambiguated record
Jyh-Cherng Yau
Also filed as: YAU JYH-CHERNG
6 granted patents·4 pending applications·15 citations·filing 2006–2011
76Inventor score
Top patents by PatentIndex Score
10 records- 0178US7977244B2Semiconductor manufacturing processUNITED MICROELECTRONICS CORP·Filed 2006·Granted Jul 12, 2011·6 cites·12 claims
- 0275US7767578B2Damascene interconnection structure and dual damascene process thereofUNITED MICROELECTRONICS CORP·Filed 2007·Granted Aug 3, 2010·5 cites·30 claims
- 0363US8282842B2Cleaning method following opening etchWANG CHIEH-JU·Filed 2007·Granted Oct 9, 2012·3 cites·16 claims
- 0453US8101092B2Method for controlling ADI-AEI CD difference ratio of openings having different sizesFENG CHIH-WEN·Filed 2007·Granted Jan 24, 2012·1 cites·16 claims
- 0551US2010105205A1Cleaning solution and semicondcutor process using the sameUNITED MICROELECTRONICS CORP·Filed 2008·Application pending·0 cites
- 0647US8080877B2Damascene interconnection structure and dual damascene process thereofHUANG CHUN-JEN·Filed 2010·Granted Dec 20, 2011·0 cites·8 claims
- 0746US8137472B2Semiconductor processLEE CHANG-HSIAO·Filed 2011·Granted Mar 20, 2012·0 cites·15 claims
- 0846US2010018944A1Patterning methodUNITED MICROELECTRONICS CORP·Filed 2008·Application pending·0 cites
- 0946US2012061840A1Damascene interconnection structure and dual damascene process thereofHUANG CHUN-JEN·Filed 2011·Application pending·0 cites
- 1039US2011130008A1Method to control critical dimensionHSIEH MING-DA·Filed 2009·Application pending·0 cites
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