Inventor · disambiguated record
Greg Bettencourt
Also filed as: BETTENCOURT GREG
4 granted patents·1 pending application·26 citations·filing 2003–2012
73Inventor score
Top patents by PatentIndex Score
5 records- 0187US8216418B2Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-ringsPATRICK ROGER·Filed 2008·Granted Jul 10, 2012·13 cites·14 claims
- 0281US8152954B2Showerhead electrode assemblies and plasma processing chambers incorporating the sameBETTENCOURT GREG·Filed 2007·Granted Apr 10, 2012·7 cites·22 claims
- 0380US8187413B2Electrode assembly and plasma processing chamber utilizing thermally conductive gasketPATRICK ROGER·Filed 2008·Granted May 29, 2012·5 cites·21 claims
- 0473US8268117B2Showerhead electrodesBETTENCOURT GREG·Filed 2012·Granted Sep 18, 2012·1 cites·17 claims
- 0535US2004162007A1Chemical mechanical polishing atomizing rinse systemPHAN KY·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →