Inventor · disambiguated record
Ryouichirou Naitou
Also filed as: NAITOU RYOUICHIROU
9 granted patents·3 pending applications·13 citations·filing 2007–2024
80Inventor score
Top patents by PatentIndex Score
12 records- 0184US9162163B2Processing liquid supply method, processing liquid supply apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Oct 20, 2015·4 cites·14 claims
- 0278US7419773B2Rinsing method and developing methodTOKYO ELECTRON LTD·Filed 2007·Granted Sep 2, 2008·6 cites·20 claims
- 0375US11664249B2Substrate processing apparatus, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2019·Granted May 30, 2023·2 cites·12 claims
- 0468US9975073B2Processing liquid supply method, processing liquid supply apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted May 22, 2018·1 cites·4 claims
- 0556US2024347354A1Heat-treating method, heat-treating apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0655US10974181B2Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment methodTOKYO ELECTRON LTD·Filed 2019·Granted Apr 13, 2021·0 cites·7 claims
- 0753US10493387B2Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 3, 2019·0 cites·8 claims
- 0849US2009042149A1Rinsing method and developing methodNAITOU RYOUICHIROU·Filed 2008·Application pending·0 cites
- 0947US9805958B2Substrate cleaning apparatus, substrate cleaning method and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Oct 31, 2017·0 cites·4 claims
- 1044US2018061690A1Substrate Processing Apparatus, Substrate Processing Method, and Recording MediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1143US11567444B2Developing treatment apparatus and developing treatment methodTOKYO ELECTRON LTD·Filed 2019·Granted Jan 31, 2023·0 cites·9 claims
- 1235US11433420B2Solution supply apparatus and solution supply methodTOKYO ELECTRON LTD·Filed 2018·Granted Sep 6, 2022·0 cites·20 claims
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