Inventor · disambiguated record
Pavel Ionov
Also filed as: IONOV PAVEL · IONOV PAVEL IGOREVICH
11 granted patents·1 pending application·1,292 citations·filing 1997–2012
94Inventor score
Top patents by PatentIndex Score
12 records- 0198US6869880B2In situ application of etch back for improved deposition into high-aspect-ratio featuresAPPLIED MATERIALS INC·Filed 2002·Granted Mar 22, 2005·241 cites·13 claims
- 0298US6080529AMethod of etching patterned layers useful as masking during subsequent etching or for damascene structuresAPPLIED MATERIALS INC·Filed 1998·Granted Jun 27, 2000·551 cites·9 claims
- 0396US6458516B1Method of etching dielectric layers using a removable hardmaskAPPLIED MATERIALS INC·Filed 2000·Granted Oct 1, 2002·113 cites·23 claims
- 0496US6331380B1Method of pattern etching a low K dielectric layerAPPLIED MATERIALS INC·Filed 2000·Granted Dec 18, 2001·159 cites·44 claims
- 0588US6013582AMethod for etching silicon oxynitride and inorganic antireflection coatingsAPPLIED MATERIALS INC·Filed 1997·Granted Jan 11, 2000·95 cites·29 claims
- 0682US6010966AHydrocarbon gases for anisotropic etching of metal-containing layersAPPLIED MATERIALS INC·Filed 1998·Granted Jan 4, 2000·65 cites·22 claims
- 0781US6537918B2Method for etching silicon oxynitride and dielectric antireflection coatingsAPPLIED MATERIALS INC·Filed 2001·Granted Mar 25, 2003·22 cites·15 claims
- 0877US8938362B2Systems, methods, and apparatus for doppler LIDARIONOV PAVEL IGOREVICH·Filed 2012·Granted Jan 20, 2015·10 cites·17 claims
- 0973US6581612B1Chamber cleaning with fluorides of iodineAPPLIED MATERIALS INC·Filed 2001·Granted Jun 24, 2003·15 cites·9 claims
- 1072US7399707B2In situ application of etch back for improved deposition into high-aspect-ratio featuresAPPLIED MATERIALS INC·Filed 2005·Granted Jul 15, 2008·3 cites·7 claims
- 1157US6291356B1Method for etching silicon oxynitride and dielectric antireflection coatingsAPPLIED MATERIALS INC·Filed 1999·Granted Sep 18, 2001·18 cites·12 claims
- 1235US2005080955A1Very high dynamic range interface for connecting peripheral devices to a computerSMALL PLANET PHOTONICS·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →