Inventor · disambiguated record
Marc Kirch
Also filed as: KIRCH MARC · KIRCH MARC JOSEPH
5 granted patents·32 citations·filing 2010–2021
77Inventor score
Top patents by PatentIndex Score
5 records- 0192US8587767B2Illumination optics for EUV microlithography and related system and apparatusFIOLKA DAMIAN·Filed 2010·Granted Nov 19, 2013·12 cites·22 claims
- 0290US11270127B1Synchronized pulses identify and locate targets rapidlyKIRCH MARC JOSEPH·Filed 2021·Granted Mar 8, 2022·9 cites·20 claims
- 0377US8395754B2Illumination optical unit for EUV microlithographyENDRES MARTIN·Filed 2010·Granted Mar 12, 2013·4 cites·20 claims
- 0474US10769447B1Synchronous convergent pulses reduce dimensions of serial surfacesKIRCH MARC JOSEPH·Filed 2017·Granted Sep 8, 2020·4 cites·20 claims
- 0568US9063336B2Optical element having a plurality of reflective facet elementsKIRCH MARC·Filed 2012·Granted Jun 23, 2015·3 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →