Assignee
ENDRES MARTIN
DE·4 granted patents·7 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0177US8395754B2Illumination optical unit for EUV microlithographyENDRES MARTIN·Filed 2010·Granted Mar 12, 2013·4 cites·20 claims
- 0271US8937708B2Illumination optics for microlithographyENDRES MARTIN·Filed 2010·Granted Jan 20, 2015·2 cites·30 claims
- 0365US9164394B2Illumination optical system and optical systems for microlithographyENDRES MARTIN·Filed 2011·Granted Oct 20, 2015·1 cites·24 claims
- 0454US8227770B2EUV illumination systemENDRES MARTIN·Filed 2009·Granted Jul 24, 2012·0 cites·26 claims
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