Inventor · disambiguated record
Hideyuki Hatoh
Also filed as: HATOH HIDEYUKI
3 granted patents·1 pending application·3 citations·filing 2011–2013
53Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0162US8664117B2Method for manufacturing semiconductor device using anisotropic etchingONO KATSUYUKI·Filed 2011·Granted Mar 4, 2014·2 cites·10 claims
- 0258US9460895B2Gas supply method for semiconductor manufacturing apparatus, gas supply system, and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Oct 4, 2016·1 cites·11 claims
- 0339US2014311676A1Substrate mounting table and plasma treatment deviceTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0432US9202706B2Method of forming pattern and solid-state image sensor deviceTOKYO ELECTRON LTD·Filed 2013·Granted Dec 1, 2015·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →