Inventor · disambiguated record
Yashaswini B. Pattar
Also filed as: PATTAR YASHASWINI · PATTAR YASHASWINI B
6 granted patents·120 citations·filing 2010–2016
82Inventor score
Top patents by PatentIndex Score
6 records- 0196US8962488B2Synchronized radio frequency pulsing for plasma etchingAPPLIED MATERIALS INC·Filed 2013·Granted Feb 24, 2015·30 cites·15 claims
- 0294US8404598B2Synchronized radio frequency pulsing for plasma etchingLIAO BRYAN·Filed 2010·Granted Mar 26, 2013·77 cites·20 claims
- 0382US9338871B2Feedforward temperature control for plasma processing apparatusMAHADESWARASWAMY CHETAN·Filed 2010·Granted May 10, 2016·5 cites·14 claims
- 0482US8916793B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowSILVEIRA FERNANDO M·Filed 2011·Granted Dec 23, 2014·7 cites·13 claims
- 0569US10854425B2Feedforward temperature control for plasma processing apparatusAPPLIED MATERIALS INC·Filed 2016·Granted Dec 1, 2020·1 cites·8 claims
- 0659US9214315B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowAPPLIED MATERIALS INC·Filed 2014·Granted Dec 15, 2015·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →