Inventor · disambiguated record
Sensho Kobayashi
Also filed as: KOBAYASHI SENSHO
7 granted patents·3 pending applications·188 citations·filing 1997–2017
84Inventor score
Top patents by PatentIndex Score
10 records- 0196US9443749B2Vacuum processing apparatusWAKABAYASHI SHINJI·Filed 2012·Granted Sep 13, 2016·142 cites·17 claims
- 0278US10229847B2Substrate transfer chamber and container connecting mechanism with lid opening mechanismsTOKYO ELECTRON LTD·Filed 2017·Granted Mar 12, 2019·2 cites·5 claims
- 0374US9147591B2Substrate processing apparatusKOBAYASHI SENSHO·Filed 2012·Granted Sep 29, 2015·4 cites·6 claims
- 0470US9230842B2Substrate processing apparatusKOBAYASHI SENSHO·Filed 2011·Granted Jan 5, 2016·3 cites·7 claims
- 0567US9228685B2Load lock deviceKOBAYASHI SENSHO·Filed 2011·Granted Jan 5, 2016·3 cites·12 claims
- 0665US5788747AExhaust system for film forming apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Aug 4, 1998·34 cites·18 claims
- 0754US2015098788A1Substrate transfer chamber and container connecting mechanismTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0847US2015246317A1Method for producing filtration filterTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0941US9810905B2Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording mediumTOKYO ELECTRON LTD·Filed 2014·Granted Nov 7, 2017·0 cites·17 claims
- 1040US2015255257A1Substrate cooling member, substrate processing device, and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →