Substrate transfer chamber and container connecting mechanism

Abstract

A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.

What is claimed is: 
     
         1 . A substrate transfer chamber, to which a plurality of containers accommodating substrates is connected, for unloading the substrates from the containers, comprising:
 a housing-shaped main body; and   a plurality of container connecting mechanisms to which the containers are connected,   wherein, in the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.   
     
     
         2 . The substrate transfer chamber of  claim 1 , the container connecting mechanisms are separately disposed at two or more side surfaces of the main body. 
     
     
         3 . The substrate transfer chamber of  claim 2 , further comprising:
 container transfer units, each having an extensible/contractible arm, configured to transfer the containers to the container connecting mechanisms,   wherein the container transfer units are respectively disposed at corners of the main body.   
     
     
         4 . The substrate transfer chamber of  claim 1 , further comprising buffers configured to temporarily place thereon the containers. 
     
     
         5 . A container connecting mechanism comprising:
 a container connecting port to which a container with a lid accommodating substrates is connected; and   a lid-opening mechanism configured to detach the lid from the container connected to the container connecting port,   wherein the lid-opening mechanism moves the lid detached from the container connecting port in an upward direction.   
     
     
         6 . A container connecting mechanism comprising:
 a container connecting port to which a container with a lid accommodating substrates is connected; and   a lid-opening mechanism configured to detach the lid from the container connected to the container connecting port,   wherein the lid-opening mechanism moves the lid detached from the container connecting port in an inclined direction.