Inventor · disambiguated record
Katsura Otaki
Also filed as: OTAKI KATSURA
4 granted patents·2 pending applications·8 citations·filing 2001–2020
66Inventor score
Top patents by PatentIndex Score
6 records- 0177US10288489B2Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one directionNIKON CORP·Filed 2013·Granted May 14, 2019·4 cites·22 claims
- 0276US8807978B2Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing methodOWA SOICHI·Filed 2010·Granted Aug 19, 2014·3 cites·13 claims
- 0373US12104891B1Spatially filtered talbot interferometer for wafer distortion measurementNIKON CORP·Filed 2020·Granted Oct 1, 2024·1 cites·33 claims
- 0452US10571340B2Method and device for measuring wavefront using diffraction grating, and exposure method and deviceNIKON CORP·Filed 2019·Granted Feb 25, 2020·0 cites·18 claims
- 0535US2008246941A1Wavefront aberration measuring device, projection exposure apparatus, method for manufacturing projection optical system, and method for manufacturing deviceOTAKI KATSURA·Filed 2007·Application pending·0 cites
- 0628US2002044287A1Point diffraction interferometer, manufacturing method for reflecting mirror, and projection exposure apparatusNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →