Inventor · disambiguated record
Robert D. Mailho
Also filed as: MAILHO ROBERT D
7 granted patents·1 pending application·776 citations·filing 1996–2004
90Inventor score
Top patents by PatentIndex Score
8 records- 0195US5891251ACVD reactor having heated process chamber within isolation chamberFiled 1996·Granted Apr 6, 1999·443 cites·13 claims
- 0287US6113984AGas injection system for CVD reactorsCONCEPT SYSTEMS DESIGN INC·Filed 1997·Granted Sep 5, 2000·86 cites·22 claims
- 0387US5653808AGas injection system for CVD reactorsFiled 1996·Granted Aug 5, 1997·89 cites·2 claims
- 0486US6436796B1Systems and methods for epitaxial processing of a semiconductor substrateMATTSON TECH INC·Filed 2000·Granted Aug 20, 2002·43 cites·30 claims
- 0584US6902622B2Systems and methods for epitaxially depositing films on a semiconductor substrateMATTSON TECH INC·Filed 2002·Granted Jun 7, 2005·38 cites·23 claims
- 0674US6118100ASusceptor hold-down mechanismMATTSON TECH INC·Filed 1999·Granted Sep 12, 2000·43 cites·18 claims
- 0770US6031211AZone heating system with feedback controlCONCEPT SYSTEMS DESIGN INC·Filed 1997·Granted Feb 29, 2000·34 cites·21 claims
- 0838US2005133159A1Systems and methods for epitaxially depositing films on a semiconductor substrateFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →