Inventor · disambiguated record
Lie-Quan Lee
Also filed as: LEE LIE-QUAN
12 granted patents·2 pending applications·50 citations·filing 2011–2021
88Inventor score
Top patents by PatentIndex Score
14 records- 0193US10345721B1Measurement library optimization in semiconductor metrologyKLA TENCOR CORP·Filed 2016·Granted Jul 9, 2019·11 cites·16 claims
- 0292US9347872B1Meta-model based measurement refinementKLA TENCOR CORP·Filed 2014·Granted May 24, 2016·11 cites·20 claims
- 0384US10502692B2Automated metrology system selectionKLA TENCOR CORP·Filed 2016·Granted Dec 10, 2019·3 cites·22 claims
- 0484US10386729B2Dynamic removal of correlation of highly correlated parameters for optical metrologyKLA TENCOR CORP·Filed 2014·Granted Aug 20, 2019·4 cites·22 claims
- 0576US8577820B2Accurate and fast neural network training for library-based critical dimension (CD) metrologyJIN WEN·Filed 2011·Granted Nov 5, 2013·8 cites·18 claims
- 0675US10732520B1Measurement library optimization in semiconductor metrologyKLA TENCOR CORP·Filed 2019·Granted Aug 4, 2020·1 cites·20 claims
- 0771US9607265B2Accurate and fast neural network training for library-based critical dimension (CD) metrologyJIN WEN·Filed 2013·Granted Mar 28, 2017·5 cites·8 claims
- 0870US9553033B2Semiconductor device models including re-usable sub-structuresKLA TENCOR CORP·Filed 2015·Granted Jan 24, 2017·2 cites·20 claims
- 0969US10255385B2Model optimization approach based on spectral sensitivityPANDEV STILIAN IVANOV·Filed 2013·Granted Apr 9, 2019·4 cites·31 claims
- 1062US11175589B2Automatic wavelength or angle pruning for optical metrologyLEE LIE QUAN·Filed 2014·Granted Nov 16, 2021·1 cites·28 claims
- 1155US11562289B2Loosely-coupled inspection and metrology system for high-volume production process monitoringKLA TENCOR CORP·Filed 2019·Granted Jan 24, 2023·0 cites·37 claims
- 1244US2021375651A1Fleet Matching Of Semiconductor Metrology Tools Without Dedicated Quality Control WafersKLA CORP·Filed 2021·Application pending·0 cites
- 1341US10895810B2Automatic selection of sample values for optical metrologyCAO MENG·Filed 2014·Granted Jan 19, 2021·0 cites·24 claims
- 1436US2013158957A1Library generation with derivatives in optical metrologyLEE LIE-QUAN·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →