Inventor · disambiguated record
Thomas S. Choi
Also filed as: CHOI THOMAS · CHOI THOMAS S
8 granted patents·278 citations·filing 1999–2018
86Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0197US6461974B1High temperature tungsten etching processLAM RES CORP·Filed 2000·Granted Oct 8, 2002·226 cites·32 claims
- 0282US7294580B2Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon additionLAM RES CORP·Filed 2004·Granted Nov 13, 2007·29 cites·20 claims
- 0371US7226852B1Preventing damage to low-k materials during resist strippingLAM RES CORP·Filed 2004·Granted Jun 5, 2007·13 cites·20 claims
- 0462US7385287B2Preventing damage to low-k materials during resist strippingLAM RES CORP·Filed 2007·Granted Jun 10, 2008·1 cites·20 claims
- 0556US8815745B2Reducing damage to low-K materials during photoresist strippingKANG SEAN S·Filed 2009·Granted Aug 26, 2014·1 cites·20 claims
- 0649US7534363B2Method for providing uniform removal of organic materialLAM RES CORP·Filed 2004·Granted May 19, 2009·3 cites·13 claims
- 0746US11437242B2Selective removal of silicon-containing materialsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 6, 2022·0 cites·17 claims
- 0833US6197388B1Methods of preventing post-etch corrosion of an aluminum neodymium-containing layerLAM RES CORP·Filed 1999·Granted Mar 6, 2001·5 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →