Inventor · disambiguated record
Yasuhito Saiga
Also filed as: SAIGA YASUHITO
8 granted patents·8 citations·filing 2007–2012
76Inventor score
Top patents by PatentIndex Score
8 records- 0175US8007968B2Substrate processing method, program, computer-readable storage medium and substrate processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Aug 30, 2011·5 cites·18 claims
- 0265US7901149B2Substrate processing method, program, computer-readable recording medium, and substrate processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Mar 8, 2011·2 cites·14 claims
- 0361US7651285B2Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Jan 26, 2010·1 cites·10 claims
- 0451US8236132B2Substrate processing system and substrate transfer methodYAMAMOTO YUICHI·Filed 2007·Granted Aug 7, 2012·0 cites·20 claims
- 0548US8702370B2Substrate transfer method for performing processes including photolithography sequenceYAMAMOTO YUICHI·Filed 2012·Granted Apr 22, 2014·0 cites·17 claims
- 0644US8133663B2Pattern forming method and apparatusYAMAMOTO TARO·Filed 2007·Granted Mar 13, 2012·0 cites·13 claims
- 0741US7826032B2Circulation system for high refractive index liquid in pattern forming apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Nov 2, 2010·0 cites·8 claims
- 0838US8889337B2Film forming method, film forming apparatus and pattern forming methodKOSUGI HITOSHI·Filed 2007·Granted Nov 18, 2014·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →