Assignee
YAMAMOTO TARO
JP·10 granted patents·1 pending application·21 citations·filing 2007–2011
Top patents by PatentIndex Score
11 records- 0178US8770111B2Transport vehicle and transport systemYAMAMOTO TARO·Filed 2011·Granted Jul 8, 2014·4 cites·7 claims
- 0275US8851092B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumYAMAMOTO TARO·Filed 2009·Granted Oct 7, 2014·5 cites·10 claims
- 0373US8387630B2Protective film removing device, mixed chemical solution recovering method and program storage mediumYAMAMOTO TARO·Filed 2007·Granted Mar 5, 2013·4 cites·12 claims
- 0473US8069816B2Coating film processing method and apparatusYAMAMOTO TARO·Filed 2007·Granted Dec 6, 2011·4 cites·11 claims
- 0572US8920922B2Polyurethane urea elastic fiberYAMAMOTO TARO·Filed 2007·Granted Dec 30, 2014·1 cites·7 claims
- 0671US8393808B2Developing methodYAMAMOTO TARO·Filed 2010·Granted Mar 12, 2013·2 cites·20 claims
- 0758US8171405B2Information processing program, information processing method, and information processing deviceYAMAMOTO TARO·Filed 2009·Granted May 1, 2012·1 cites·18 claims
- 0853US8518494B2Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the methodYAMAMOTO TARO·Filed 2007·Granted Aug 27, 2013·0 cites·11 claims
- 0951US8445189B2Developing device and developing methodYAMAMOTO TARO·Filed 2011·Granted May 21, 2013·0 cites·12 claims
- 1047US2012006362A1Substrate cleaning device and substrate cleaning methodYAMAMOTO TARO·Filed 2011·Application pending·0 cites
- 1144US8133663B2Pattern forming method and apparatusYAMAMOTO TARO·Filed 2007·Granted Mar 13, 2012·0 cites·13 claims
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