Inventor · disambiguated record
Steven T. Li
Also filed as: LI STEVEN · LI STEVEN T
5 granted patents·66 citations·filing 1997–2009
80Inventor score
Top patents by PatentIndex Score
5 records- 0180US6500266B1Heater temperature uniformity qualification toolAPPLIED MATERIALS INC·Filed 2000·Granted Dec 31, 2002·30 cites·25 claims
- 0258US6143084AApparatus and method for generating plasmaAPPLIED MATERIALS INC·Filed 1998·Granted Nov 7, 2000·14 cites·52 claims
- 0352US6116186AApparatus for cooling a plasma generatorAPPLIED MATERIALS INC·Filed 1998·Granted Sep 12, 2000·11 cites·14 claims
- 0446US8147909B2Method of making and using alloy susceptor with improved properties for film depositionWU SHUO-JIEH·Filed 2009·Granted Apr 3, 2012·1 cites·11 claims
- 0541US6276295B1Thermal reflow method employing microwave energyAPPLIED MATERIALS INC·Filed 1997·Granted Aug 21, 2001·10 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →