Inventor · disambiguated record
Kaichiro Minami
Also filed as: MINAMI KAICHIRO
3 granted patents·2 pending applications·6 citations·filing 2011–2022
59Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0170US8486222B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Jul 16, 2013·3 cites·9 claims
- 0259US8987645B2Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the sameOGAWA UNRYU·Filed 2011·Granted Mar 24, 2015·2 cites·4 claims
- 0358US8557720B2Substrate processing apparatus and method of manufacturing a semiconductor deviceAKAO TOKUNOBU·Filed 2011·Granted Oct 15, 2013·1 cites·12 claims
- 0451US2023295837A1Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0542US2015147873A1Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable storage mediumHITACHI INT ELECTRIC INC·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →