Assignee
OGAWA UNRYU
JP·1 granted patent·1 pending application·2 citations·filing 2008–2011
Top patents by PatentIndex Score
2 records- 0159US8987645B2Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the sameOGAWA UNRYU·Filed 2011·Granted Mar 24, 2015·2 cites·4 claims
- 0240US2009050056A1Substrate processing apparatus and semiconductor manufacturing method thereofOGAWA UNRYU·Filed 2008·Application pending·0 cites
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